Amplitude-Modulating Probe Card with Eccentric Roller Adjustment

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Solution Overview

Problem

Existing probe cards are not universal and require multiple setups to match different contact sets on semiconductor wafers, limiting their versatility and efficiency in detecting various circuit contacts.

Innovation Solution

An amplitude-modulating probe card with a probe structure comprising a probe head, bent wire, and fixed wire, along with an amplitude-modulating structure featuring a main roller, eccentric roller, and driving mechanism, allowing for adjustable detection amplitude by altering the position of probes through elastic deformation and rotational movement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple probe cards are used to match different contact sets, then detection coverage is improved, but device complexity and operational difficulty increase

Engineering Contradiction:
Improvedetection coverageVSAvoiddevice complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The probe card is designed with a universal structure that can detect different contact sets through amplitude modulation. The probe card includes an amplitude modulation structure with adjustable components that enable a single probe card to perform multiple detection functions, eliminating the need for multiple specialized probe cards.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The probe card incorporates dynamic adjustment mechanisms including an amplitude modulation shaft, rollers, and elastic structures that allow real-time modification of probe positions and detection amplitudes. This dynamic capability enables a single probe card to adapt to different contact configurations without requiring multiple static probe card designs.

Inventive Principle:
Principle #15Dynamics

2Adaptability or versatility

If multiple movable platforms are used to move probe cards, then matching different contact sets is achieved, but device complexity and ease of operation worsen

Engineering Contradiction:
Improvematching capabilityVSAvoidease of operation
Core Design Contradiction:
Adaptability or versatilityVSEase of operation

Solution Approach 1:

The probe card integrates multiple functions including detection, amplitude modulation, and positioning adjustment into a single universal device. The amplitude modulation structure allows the same probe card to match different contact sets by adjusting detection parameters rather than requiring separate platforms for each contact configuration.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention extracts the positioning and matching functionality from separate movable platforms and integrates it into the probe card's amplitude modulation structure. This consolidation eliminates the need for complex external positioning mechanisms while maintaining the ability to match different contact sets.

Inventive Principle:
Principle #2Taking out (Extraction)

3Device complexity

If probe position is fixed, then structural simplicity is maintained, but adaptability to different contact configurations decreases

Engineering Contradiction:
Improvestructural simplicityVSAvoidadaptability
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The probe card employs dynamic adjustment mechanisms including an amplitude modulation shaft that can rotate, rollers that can move along the shaft, and elastic structures that can deform. These dynamic elements allow the probe position and detection amplitude to be adjusted for different contact configurations while maintaining a relatively simple overall structure.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The invention changes physical parameters such as the position of rollers on the amplitude modulation shaft, the degree of elastic deformation, and the detection amplitude to adapt to different contact configurations. These parameter changes enable versatility without requiring fundamental structural changes or complex mechanisms.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables a single probe card to be universal by adjusting the detection amplitude and number of probes involved, improving detection efficiency and versatility across different contact configurations without generating electromagnetic interference.

Implementation Method 1

the middle of the bent wire is a bent elastic structure

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Data Source

PatentUS12188962B2Amplitude-modulating probe card and its probe and amplitude-modulating structure
Publication Date: 2025.01.07 MAXONE SEMICON CO LTD
  • US12188962B2 patent drawing
  • US12188962B2 patent drawing
  • US12188962B2 patent drawing

AI summary

A probe card has a probe, probe and circuit boards, and amplitude-modulating structure. The probe is fixed on the probe board, one end is connected to the circuit board, and the other end is clamped on the amplitude-modulating structure. The probe is equipped with a bent wire to make longitudinal elastic deformation for the probe, and the probe head is equipped with an amplitude-modulating board. The amplitude-modulating board is driven by an eccentric roller, which can achieve upward and downward movement of the amplitude-modulating board, thereby driving the probe to deform, causing the probe head of the probe to move from the detection position to the ready position, or from the ready position to the detection position, so that the number of probes in the detection position can be adjusted to enable to adjust the detection amplitude of a single probe card, making the probe card universal.