Automated Ampoule Drying and Leak Testing System
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Solution Overview
Problem
Existing methods for drying and testing precursor source ampoules are labor-intensive, prone to errors, and lack comprehensive quality control, leading to unreliable leak testing and potential operational failures due to manual handling and separate testing stations, which can result in defective ampoules being reused and resource wastage.
Innovation Solution
An automated system, ADACS, integrates drying, moisture analysis, particle shedding testing, differential pressure testing, and helium leak checking in a single apparatus, allowing for automated valve manipulation and data recording without manual disconnection, ensuring consistent and reproducible results.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If manual leak testing and separate testing stations are used, then equipment simplicity is maintained, but reliability of leak testing deteriorates due to operator errors and potential damage to ampoules
Solution Approach 1:
The patent combines multiple testing functions (leak detection, particle shedding analysis, differential pressure testing) into a single integrated automated testing station. This eliminates the need for separate testing stations and manual handling, thereby improving reliability while the automation manages the increased functional complexity.
Solution Approach 2:
The patent replaces manual mechanical operations (operator handling, connection/disconnection of ampoules) with an automated robotic system. This substitution eliminates operator errors and potential damage to ampoules during handling, significantly improving leak testing reliability.
2Reliability
If automated integrated testing system is implemented, then reliability and consistency of results improve, but device complexity increases
Solution Approach 1:
The automated testing station is designed as a universal platform that performs multiple testing functions (leak detection, particle analysis, pressure testing) within a single system. This multi-functionality achieves consistent reliable results across different test types while managing complexity through integrated design.
Solution Approach 2:
The system incorporates automated sample handling, data collection, and analysis capabilities that operate autonomously. The automated robotic system handles ampoules, connects/disconnects them, and performs all testing operations without human intervention, ensuring consistent results while the automation architecture manages system complexity.
3Ease of operation
If multiple connection and disconnection steps are required, then ease of operation is reduced, but manufacturing precision can be maintained
Solution Approach 1:
The automated system maintains continuous operation with the ampoule remaining connected throughout the testing sequence. The robotic system performs all testing operations (leak detection, particle analysis, pressure testing) without requiring disconnection and reconnection, eliminating potential damage to seals while maintaining precision through uninterrupted testing.
Solution Approach 2:
The system performs preliminary connection of the ampoule in a controlled manner, establishing all necessary connections before beginning the testing sequence. This preliminary setup allows subsequent tests to proceed without additional connection/disconnection cycles, protecting seal integrity while simplifying the operational procedure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The ADACS system provides a comprehensive, efficient, and standardized method for ampoule preparation, reducing errors and resource wastage by ensuring ampoules are thoroughly dried and tested in a single location, enhancing quality control and reducing the risk of operational failures.
Implementation Method 1
The drying systems can heat the ampoule environment only to a temperature that is limited by the maximum temperature that can be tolerated by the valve seat or other temperature-sensitive components
Implementation Method 2
The ampoules are received by the supplier containing residual product and reaction and/or degradation products
Implementation Method 3
Prior to being returned to service, some prior art dried ampoules have been leak checked using inert gas leak detector stations
Implementation Method 4
The helium leak detector station evacuates the ampoule to a vacuum
Data Source
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AI summary
Embodiments of the present invention provide a system and method to perform drying and testing of organometallic and organosilane precursor source ampoules that have been cleaned for re-use. The drying and quality control testing is performed in a single location with a single apparatus requiring only one manual connection/disconnection step of the ampoule to the apparatus. The testing includes analyses for residual moisture, entrained particulate matter, differential pressure, and helium leak checking.