Integrated Analysis Tray for Mixed Wafer Sample Handling
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Solution Overview
Problem
The manual processes involved in semiconductor wafer destructive analysis lead to reliability issues, damage to the region of interest, and safety concerns, while current transport/storage devices for sample aids are not compatible for mixing.
Innovation Solution
A single integrated tray design for wafer destructive analysis that includes a plate with specific regions for fixing a stub and a grid holder, along with a tray ID, and a destructive analysis automation apparatus that automates the transportation and storage of test wafer pieces and samples, using modules like interlayer transport, exchange, and tray stockers to streamline the process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual processes are used for wafer destructive analysis, then flexibility and simplicity are maintained, but reliability deteriorates due to setting errors and damage to regions of interest
Solution Approach 1:
The system enables self-service automation where the destructive analysis apparatus automatically sets analysis regions, transports wafers, and coordinates with storage devices without manual intervention. The automated tray loading and region setting eliminate human errors while maintaining systematic control through programmed sequences.
Solution Approach 2:
Manual mechanical operations are replaced with automated mechanical systems. The tray handling, wafer transport, and region positioning are performed by automated mechanisms controlled by a central system, substituting human manual operations with programmable mechanical automation to improve reliability.
2Adaptability or versatility
If separate transport/storage devices are developed for each sample aid, then specific functionality is optimized, but device complexity increases and mixing becomes impossible
Solution Approach 1:
A universal tray design is implemented that can accommodate multiple types of sample aids including wafers, stubs, and grid holders. The standardized tray interface allows different sample aids to be transported and stored using the same device, enabling mixing and eliminating the need for separate dedicated devices for each sample type.
Solution Approach 2:
Multiple separate transport and storage functions are merged into a single integrated system. The tray stocker and transport mechanisms handle various sample aids (wafers, stubs, grid holders) together in unified operations, combining previously separate device functions into one versatile platform.
3Productivity
If automated transportation and storage systems are implemented, then productivity and efficiency are improved, but device complexity increases
Solution Approach 1:
The automated system is segmented into modular functional units including tray loading, wafer transport, storage, and region setting. Each module performs a specific function and can operate semi-independently, allowing the complex automation system to be managed through discrete, manageable segments that collectively improve productivity.
Data Source
AI summary
Provided is a tray including a plate including a first region and a second region, a first groove on the first region of the plate and to which a stub is fixed, and a second groove on the second region of the plate and to which a grid holder is fixed, wherein the stub is configured to store test wafer pieces, and wherein the grid holder is configured to store a test sample.