Analyte Sampling Apparatus with Aerosol Trapping for Real-Time Monitoring
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Solution Overview
Problem
Conventional methods for monitoring metal and metallic compounds in air and process gases are inefficient, requiring long sampling times, complex pre-treatment processes, and are not suitable for real-time monitoring, especially in industrial settings like semiconductor fabrication, leading to contamination and data reliability issues.
Innovation Solution
An analyte sampling apparatus using a spray unit to mix and trap analyte samples with a trapping solution in an aerosol state, followed by secondary trapping in a tube and container, allowing for real-time sampling and analysis without contamination, using a sample transfer unit to feed the trapped solution to an analysis unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional passive sampling methods (filter, impinge, wafer) are used to measure metal and metallic compound, then measurement capability is achieved, but sampling time becomes extremely long (24-96 hours) and real-time monitoring is impossible
Solution Approach 1:
The patent replaces conventional passive mechanical sampling methods with an active sampling system that uses a pump to actively draw samples through a denuder. This substitution enables real-time monitoring by actively transporting the sample through the system rather than relying on passive accumulation over extended periods.
Solution Approach 2:
The patent changes the sampling rate parameter from extremely low passive sampling to high-speed active sampling (e.g., 100-1000 times faster). This parameter change in sampling rate directly reduces sampling time from hours to minutes or seconds while maintaining detection precision through the denuder's efficient contaminant removal.
2Quantity of substance
If long-time sampling (24-96 hours) is performed to obtain meaningful results, then sufficient analyte amount is collected, but sample contamination occurs and data reliability degrades
Solution Approach 1:
The patent applies preliminary action by pre-coating the denuder with a trapping solution before sampling begins. This preliminary preparation enables the denuder to immediately capture metal and metallic compound contaminants as they pass through, preventing sample contamination during the sampling process and ensuring data reliability from the start of sampling.
Solution Approach 2:
The denuder acts as an intermediary device between the sample source and the analysis instrument. It selectively removes contaminants from the sample stream using a trapping solution, thereby protecting the subsequent analysis system from contamination and ensuring reliable data without requiring extremely long sampling times.
3Measurement precision
If complex pre-treatment process is performed to analyze sample filter, then analysis capability is achieved, but time and manpower are significantly wasted
Solution Approach 1:
The patent extracts and removes the complex pre-treatment step from the analysis process. By using a denuder with pre-applied trapping solution that directly captures contaminants in a ready-to-analyze form, the system eliminates the need for complex filter extraction and pre-treatment procedures, significantly improving productivity while maintaining analysis capability.
Solution Approach 2:
The denuder performs self-service by automatically trapping contaminants as the sample passes through it. The trapping solution on the denuder surface directly captures metal and metallic compound without requiring external pre-treatment interventions, thereby eliminating manual pre-treatment steps and improving overall sampling efficiency.
4Area of stationary object
If samples are transferred to analyzer at distance of several tens to hundreds of meters, then coverage of large-scale fabrication line is achieved, but sample contamination and loss occur
Solution Approach 1:
The denuder serves as an intermediary that conditions the sample during transport. By removing contaminants and stabilizing the sample matrix as it passes through the denuder, the system protects sample integrity during long-distance transfer to the analyzer, enabling wide-area monitoring without compromising reliability.
Solution Approach 2:
The system performs preliminary sample preparation and contamination removal at the sampling location before transport. This preliminary action ensures that samples remain stable and contamination-free during long-distance transfer to analyzers located throughout large-scale fabrication facilities.
5Measurement precision
If conventional sampling method is used, then metal and metallic compound can be measured, but real-time monitoring is impossible and environment cannot be improved or contamination prevented
Solution Approach 1:
The patent replaces passive sampling mechanics with active sampling using a pump and denuder system. This mechanical substitution enables real-time monitoring by actively drawing samples through the denuder at high flow rates, achieving both detection precision and rapid monitoring speed simultaneously.
Solution Approach 2:
The system changes the sampling flow rate parameter from extremely low passive sampling to high-speed active sampling. This parameter change enables real-time monitoring while the denuder maintains detection precision by efficiently capturing contaminants even at these higher flow rates.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient, real-time trapping and analysis of analyte materials in both gas and liquid phases, improving data reliability and allowing for rapid monitoring of metal and metallic compounds, even at distant locations, reducing contamination risks and sampling time.
Implementation Method 1
a spray unit to receive a trapping solution and an analyte sample, and to mix and spray the analyte sample and the trapping solution of an aerosol state together
Implementation Method 2
a trapping tube to secondarily trap the analyte material, which is not trapped in the spray chamber, by receiving the analyte sample and the trapping solution in the aerosol state from the spray chamber and mixing the trapping solution with the analyte sample
Data Source
AI summary
Disclosed are an apparatus for analyte sampling, and a method of analyte sampling and an analyte sampling analysis system using the same. The apparatus includes a spray unit to receive a trapping solution and an analyte sample, and to mix and spray the analyte sample and the trapping solution of an aerosol state together, a spray chamber to provide a space to primarily trap an analyte material, which is contained in the analyte sample, in the trapping solution of the aerosol state, a trapping tube to secondarily trap the analyte material, which is not trapped in the spray chamber, by receiving the analyte sample and the trapping solution in the aerosol state from the spray chamber and mixing the trapping solution with the analyte sample, a trapping container to receive the trapping solution having the analyte material trapped therein through the trapping tube, and a sample transfer unit to feed purge gas into the trapping container to transfer the trapping solution having the analyte material trapped therein to an analysis unit through a sample transfer line by the purge gas.