Analyzer Automated WDS Condition Setting via EDS

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Solution Overview

Problem

Existing electron probe micro analyzers (EPMA) require operators to have knowledge of spectroscopic elements and conditions for WDS analysis, making it difficult to easily set spectroscopic conditions for WDS analysis.

Innovation Solution

An analyzer that includes a wavelength-dispersive X-ray spectrometer and a control unit that performs preparatory analysis using an X-ray fluorescence analyzer to acquire analysis results and set spectroscopic conditions for WDS analysis, allowing for automated setting and execution of WDS analysis.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If WDS analysis is performed with manual setting of spectroscopic conditions, then analysis precision can be maintained, but operator knowledge and complexity increase

Engineering Contradiction:
Improveanalysis precisionVSAvoidease of setting spectroscopic conditions
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The system performs preliminary identification of candidate elements using EDS analysis before WDS analysis. The control unit automatically determines which elements to analyze based on the EDS results, pre-selecting spectroscopic conditions for the subsequent WDS analysis without requiring operator intervention.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The control unit acts as an intermediary between the EDS and WDS analysis systems. It processes EDS results to identify candidate elements and automatically configures the appropriate spectroscopic conditions for WDS analysis, bridging the gap between the two analytical methods.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of operation

If automated element identification is implemented, then ease of operation improves, but reliability of element identification may deteriorate

Engineering Contradiction:
Improveautomated spectroscopic condition settingVSAvoidreliability of element identification
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The system performs EDS analysis to identify candidate elements, then performs WDS analysis on all identified candidate elements even if some may be false positives. This excessive action ensures that no potential elements are missed, maintaining reliability while achieving automation.

Inventive Principle:
Principle #16Partial or excessive action

Solution Approach 2:

The control unit uses feedback from EDS analysis results to automatically adjust and set spectroscopic conditions for WDS analysis. The system continuously refines element identification based on the spectral data obtained, improving reliability through iterative analysis.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables easy performance of WDS analysis by automating the setting of spectroscopic conditions, improving analysis efficiency and sensitivity, especially in detecting trace elements, and reducing the influence of electron beam damage.

Implementation Method 1

a wavelength-dispersive X-ray spectrometer that is arranged to detect a characteristic X-ray generated from a specimen irradiated with an electron beam

Methodology Applied
Scientific EffectWavelength-dispersive X-ray spectroscopy: Bragg Diffraction

Implementation Method 2

perform a preparatory analysis of a specimen to be analyzed using the X-ray fluorescence analyzer

Methodology Applied
Scientific EffectX-ray fluorescence: Fluorescence

Data Source

PatentEP3770589B1analyzer
Publication Date: 2023.04.26 JEOL LTD
  • EP3770589B1 patent drawingFigure 1
  • EP3770589B1 patent drawingFigure 2~3
  • EP3770589B1 patent drawingFigure 4

AI summary

An analyzer includes a wavelength-dispersive X-ray spectrometer and a control unit that controls the wavelength-dispersive X-ray spectrometer, the control unit performing: processing of acquiring an analysis result of preparatory analysis performed on a specimen to be analyzed; processing of setting spectroscopic conditions for WDS analysis using the wavelength-dispersive X-ray spectrometer based on the analysis result of the preparatory analysis; and processing of performing the WDS analysis on the specimen to be analyzed under the set spectroscopic conditions.