Angle-Resolved Raman Spectroscopy for Nanostructure Analysis
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Solution Overview
Problem
Conventional Raman spectroscopy systems are limited by capturing Raman spectra only at various wavelengths and a single illumination direction, which restricts the information that can be obtained during the analysis.
Innovation Solution
A system, method, and non-transitory computer readable medium that enables accurate Raman spectroscopy by collecting and interpreting angle-resolved Raman scattered light from Raman-active materials, micro-structures, and nano-structures, allowing for Raman spectra to be obtained at different scattering angles and by illuminating the sample from various angles and polarizations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional Raman spectroscopy is used with single illumination direction, then the system is simple and easy to operate, but the information retrieval is limited and measurement precision is reduced
Solution Approach 1:
The patent extends conventional Raman spectroscopy from single-angle measurement to multi-angle measurement by introducing angular resolution as an additional dimension. The system collects Raman scattered light at multiple scattering angles simultaneously, transforming the one-dimensional spectral data into two-dimensional angle-resolved spectral data, thereby extracting additional information about nano-structure materials and dimensions without fundamentally redesigning the core Raman instrumentation
Solution Approach 2:
The patent makes the Raman spectroscopy system multi-functional by enabling it to simultaneously perform conventional compositional analysis and new angular-resolved analysis. The same Raman spectrometer can extract multiple types of information (composition, stress, doping level, and nano-structure dimensions) by varying the collection angle, eliminating the need for separate specialized instruments for different measurement objectives
2Loss of information
If Raman spectra are collected at multiple scattering angles, then the information retrieval is enhanced, but the measurement time increases
Solution Approach 1:
The patent maintains continuous measurement by collecting Raman scattered light at multiple scattering angles simultaneously in a single continuous acquisition process. Rather than performing sequential measurements at different angles which would increase measurement time, the system captures angular information continuously across the spectrum, ensuring that all angular data is obtained without interruption and minimizing total measurement time
Solution Approach 2:
By adding angular resolution as an additional dimension to the Raman spectrum, the system extracts multiple pieces of information (composition, stress, doping level, nano-structure dimensions) from a single continuous measurement process. This dimensional expansion allows parallel extraction of multiple parameters without requiring separate sequential measurements, thereby reducing overall measurement time while increasing information completeness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the information retrieval from Raman spectroscopy, enabling the extraction of critical quantities about nano-structure materials and dimensions, and allowing for the concurrent assessment of doping level, stress, and composition.
Implementation Method 1
collecting and interpreting angle-resolved Raman scattered light from Raman-active materials
Implementation Method 2
illuminating the sample from various angles and polarizations
Data Source
AI summary
An optical measurement system, the optical measurement system comprises optics, wherein the optics include a collection path and an illumination path and an objective lens. The optics is configured to acquire Raman spectrums of one or more structural elements located at a measurement site of the sample while being set-up to apply one or more optics parameters that comprise an illumination angle out of a set of multiple illumination angles that correspond to a numerical aperture of the objective lens. Each of the one or more structural elements has a dimension that ranges between one tenth of nanometer to one hundred microns; an optical spectrometer; a Raman detector that is downstream to the optical spectrometer; and a control unit that is configured to determine an expected radiation pattern to be detected by the Raman detector when the optics are set-up to apply the one or more optics parameters.