Angle-Tuned Wavelength Selection for Cost-Effective DUV Lasers
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Solution Overview
Problem
Existing laser systems are limited in their ability to produce deep ultraviolet wavelengths efficiently, particularly in the 200 to 400 nm range, due to the limitations of supercontinuum lasers and the high cost associated with generating ultraviolet wavelengths using femtosecond pulse lasers and optical parametric oscillators.
Innovation Solution
A tunable DUV laser system is developed using a supercontinuum laser, an angle-dependent wavelength selector, a compressor, and non-linear crystals to filter and convert specific wavelengths into deep ultraviolet wavelengths, enabling cost-effective production of DUV lasers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a supercontinuum laser is used to generate broad spectrum light, then wavelength coverage is improved, but the intensity at specific ultraviolet wavelengths becomes very weak
Solution Approach 1:
The patent extracts a specific wavelength band from the broad spectrum supercontinuum laser using an optical bandpass filter. This filter isolates the desired wavelength range (e.g., 400-600 nm or 800-1000 nm) to provide sufficient intensity for effective frequency conversion in the non-linear crystal, while discarding other wavelength components that would dilute the energy.
Solution Approach 2:
The patent changes the temporal parameter of the laser pulse by compressing the pulse duration from picosecond/femtosecond range to a shorter duration. This pulse compression increases the peak power and intensity of the filtered wavelength, enabling efficient non-linear optical conversion to deep ultraviolet wavelengths while maintaining the broad initial spectral coverage.
2Measurement precision
If femtosecond pulse lasers and optical parametric oscillators are used to generate ultraviolet wavelengths, then wavelength precision is improved, but the overall cost of the laser system increases
Solution Approach 1:
The patent makes a single supercontinuum laser source perform multiple functions by using an adjustable optical bandpass filter. The same laser system can be tuned to different wavelength ranges (e.g., 400-600 nm, 800-1000 nm, or other bands) simply by adjusting the filter, eliminating the need for separate femtosecond lasers and OPO systems for each wavelength application.
Solution Approach 2:
The patent replaces expensive, complex femtosecond laser systems with a more cost-effective approach using a supercontinuum laser combined with an optical bandpass filter. While the supercontinuum laser is a sophisticated device, it is more economical than maintaining multiple specialized femtosecond lasers and OPO systems, providing a cost-effective solution for generating deep ultraviolet wavelengths.
3Adaptability or versatility
If the angle of the optical bandpass filter is adjusted to select different wavelengths, then wavelength tunability is improved, but the alignment precision and stability become more difficult to maintain
Solution Approach 1:
The patent implements a dynamic adjustment mechanism for the optical bandpass filter angle, allowing real-time tuning of the selected wavelength. The filter can be rotated to different angles to select different wavelength bands, and the system includes mechanisms to maintain stable operation at each selected wavelength, balancing tunability with alignment stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively expands the scope of laser applications by enabling tunable filtering and conversion of wavelengths from 400 to 600 nm or 800 to 1000 nm into deep ultraviolet wavelengths of 200 to 280 nm, while reducing the overall cost of the laser system.
Implementation Method 1
a non-linear crystal configured to convert the wavelength of light incident from the compressor into an ultraviolet wavelength
Implementation Method 2
a wavelength selector comprising a filter whose angle is adjustable and configured to filter the wavelength of light incident from the supercontinuum laser to have a wavelength corresponding to the angle of the filter
Implementation Method 3
a compressor configured to compress the pulse width of light incident from the wavelength selector
Data Source
Figure 1~2(d)
Figure 3~4
Figure 5(a)~5(d)
AI summary
A laser system according to an example of the present disclosure comprises: a supercontinuum laser that generates light with a visible wavelength; a wavelength selector comprising a filter whose angle is adjustable and configured to filter the wavelength of light incident from the supercontinuum laser to have a wavelength corresponding to the angle of the filter based on the angle of the filter; a compressor configured to compress the pulse width of light incident from the wavelength selector; and, a non-linear crystal configured to convert the wavelength of light incident from the compressor into an ultraviolet wavelength.