Angle-Tuned Wavelength Selection for Tunable DUV Laser Output
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Solution Overview
Problem
Existing laser systems struggle to produce deep ultraviolet (DUV) wavelengths efficiently, as supercontinuum lasers have limited applicability due to their broad spectrum, and methods involving femtosecond pulse lasers and non-linear crystals result in weak intensity and high costs.
Innovation Solution
A tunable laser system that utilizes a supercontinuum laser, an adjustable angle filter for wavelength selection, a compressor to narrow the pulse width, and non-linear crystals to convert the wavelength into deep ultraviolet, enabling efficient generation of DUV wavelengths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a supercontinuum laser with a broad spectrum is used to generate multiple wavelengths, then the versatility of the laser system is improved, but the intensity at specific wavelengths becomes weak and the system complexity increases
Solution Approach 1:
The patent extracts only the needed wavelength from the supercontinuum laser's broad spectrum using a wavelength selector (filter or diffraction grating), converting the versatile but weak broad-spectrum output into a focused, high-intensity narrow-band wavelength suitable for DUV generation
Solution Approach 2:
The system segments the broad spectrum into selectable wavelength bands using the wavelength selector, allowing independent optimization of intensity for each selected wavelength through the subsequent non-linear crystal conversion process
2Adaptability or versatility
If femtosecond pulse lasers with non-linear crystals are used to generate ultraviolet wavelengths, then the wavelength conversion capability is improved, but the intensity remains weak and the cost increases
Solution Approach 1:
The patent performs preliminary compression of the laser pulse width before the wavelength conversion process, creating extremely short high-intensity pulses that drive more efficient non-linear optical conversion in the crystal, thereby generating stronger ultraviolet output
Solution Approach 2:
The system changes the temporal parameter (pulse width) of the laser to extremely short durations (femtosecond range), which increases the peak intensity and enables efficient wavelength conversion to ultraviolet while maintaining system cost-effectiveness
3Power
If multiple femtosecond lasers and optimized OPOs are provided for each specific wavelength, then the intensity at each wavelength is improved, but the device complexity and overall cost increase significantly
Solution Approach 1:
The patent creates a universal laser system where a single supercontinuum laser source can generate multiple ultraviolet wavelengths by adjusting the wavelength selector and compressor parameters, eliminating the need for multiple dedicated laser systems and reducing overall complexity
Solution Approach 2:
The system introduces dynamic adjustability through the wavelength selector (with adjustable filter angles or grating orientations) and variable compressor, allowing the same hardware platform to be tuned to different wavelengths and optimized for different applications without physical reconfiguration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively expands the scope of laser applications by enabling tunable filtering and conversion of wavelengths from 400 to 600 nm or 800 to 1000 nm to deep ultraviolet wavelengths of 200 to 280 nm, while reducing costs and improving intensity.
Implementation Method 1
a non-linear crystal configured to convert the wavelength of light incident from the compressor into an ultraviolet wavelength
Implementation Method 2
a wavelength selector comprising a filter whose angle is adjustable and configured to filter the wavelength of light incident from the supercontinuum laser to have a wavelength corresponding to the angle of the filter
Implementation Method 3
a compressor configured to compress the pulse width of light incident from the wavelength selector
Data Source
AI summary
A laser system according to an example of the present disclosure comprises: a supercontinuum laser that generates light with a visible wavelength; a wavelength selector comprising a filter whose angle is adjustable and configured to filter the wavelength of light incident from the supercontinuum laser to have a wavelength corresponding to the angle of the filter based on the angle of the filter; a compressor configured to compress the pulse width of light incident from the wavelength selector; and, a non-linear crystal configured to convert the wavelength of light incident from the compressor into an ultraviolet wavelength.