Angled Electronics Module Layout for Safer Semiconductor Maintenance
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Solution Overview
Problem
In semiconductor processing systems, maintenance workers face safety challenges in limited clean room spaces due to the need to switch off power for electronic components, which requires sufficient space to move away from potential electrical hazards, but the compact layout of these systems leaves little room for safe movement.
Innovation Solution
The electronics module's mounting basis is angled between 10 and 80 degrees relative to the door, allowing maintenance workers to move away from electrical components at an angle, increasing the available space in the narrow alley and reducing the risk of collision with adjacent systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the electronics module is located behind a door in the front wall to create access for maintenance, then the electronic component becomes accessible for maintenance work, but the maintenance worker has very limited space to move away from the electrical component in case of electronic hazard
Solution Approach 1:
The mounting basis is rotated from a perpendicular orientation to the door into the plane of the door, changing the spatial dimension of the electronic component's position. This dimensional change allows the maintenance worker to move laterally along the door plane rather than being constrained to move only in the direction perpendicular to the door, thereby increasing the available escape space in the narrow alley while maintaining access to the electronic component through the door opening.
2Ease of manufacture
If the mounting basis is perpendicular to the door, then the electronic component is mounted in a straightforward manner, but the maintenance worker has minimal space to move away perpendicular to the wall in case of hazard
Solution Approach 1:
The mounting basis is deliberately positioned asymmetrically at an angle between 10 and 80 degrees relative to the door plane, rather than symmetrically perpendicular to it. This asymmetric positioning creates an angled escape path for the maintenance worker that utilizes the lateral space along the door, providing sufficient room to move away from the electronic component in case of hazard while still allowing straightforward access through the door.
3Area of stationary object
If the alley between adjacent systems is made narrow to maximize space utilization, then the clean room layout is optimized, but the maintenance worker has insufficient space to move away from electrical hazards
Solution Approach 1:
The electronic component is positioned at an angle to the door, changing the spatial relationship from a perpendicular mounting to an angled mounting within the plane of the door. This dimensional repositioning creates an angled escape trajectory for the maintenance worker that extends laterally along the door rather than directly away from it, effectively utilizing the available narrow alley space to provide a safe escape path without requiring additional width in the clean room.
Data Source
AI summary
The disclosure relates to a semiconductor processing system for processing semiconductor substrates and provided with a housing formed by a wall. The system may further comprise a processing module and a cassette module, the cassette module located adjacent the processing module. An electronics module may be provided with a support for mounting electronic components, whereby the electronics module is located behind a door in the wall of the system to create access for maintenance. The electronic components have a straight mounting basis for mounting of the electronics components whereby the mounting basis is mounted in the system under an angle between 10 and 80 degrees with respect to the door when the door is closed.