Angled Gas Injection Module for Dust-Free Pipe Flow
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The accumulation of dust on pipe walls in semiconductor processing systems leads to clogging, necessitating the use of heating zones that increase manufacturing costs without fully addressing the issue.
Innovation Solution
A gas injection module and system that generates a controlled gas flow through a predetermined angle to prevent dust accumulation by replacing traditional heating zones, utilizing a device body with a delivering cavity, annular gas flow generation cavity, and nozzles to create a pushing gas flow that carries the gas through pipes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If heating zones are arranged on the pipes to prevent dust accumulation, then dust clumping is prevented, but manufacturing cost increases and pipe cleaning is still required
Solution Approach 1:
The invention extracts the dust prevention function from the traditional heating zone structure and relocates it to the gas injection system. By injecting gas directly into the pipe flow, the system separates the dust prevention mechanism from the pipe wall, eliminating the need for heating zones while maintaining effectiveness
Solution Approach 2:
The invention uses pneumatic injection of gas through nozzles to create turbulence and prevent dust accumulation. This replaces the thermal method (heating zones) with a pneumatic method, using gas flow dynamics to achieve the same dust prevention objective without the complexity of heating infrastructure
2Reliability
If heating zones are installed to prevent dust accumulation, then dust clumping is reduced, but manufacturing cost increases
Solution Approach 1:
The invention uses simple, inexpensive gas injection nozzles instead of expensive heating zones. The gas injection components are much cheaper to manufacture and install, providing an cost-effective solution that eliminates the need for costly heating infrastructure while maintaining dust prevention effectiveness
Solution Approach 2:
The invention removes the expensive heating zone components from the system and extracts only the essential function (dust prevention) to be achieved through the simpler gas injection method, thereby reducing manufacturing costs while preserving the core benefit
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents pipe clogging by ensuring dust is carried away, reducing manufacturing and maintenance costs by eliminating the need for heating zones.
Implementation Method 1
The at least one nozzle portion is connected to the delivering cavity and is configured to generate a pushing gas flow to the delivering cavity along a pre-determined path
Data Source
Figure 1
Figure 2
Figure 3
AI summary
A gas injection module (M) and an active gas injection system (Z) are provided. The gas injection module (M) includes a device body (M1), the internal of which has a delivering cavity (M10) and an annular gas-flow generation cavity (M11). One end of the device body (M1) has a gas input portion (M2), and another end thereof has a gas output portion (M3). One side of the device body (M1) is configured to extend outward to form a gas guiding portion (M4). The annular gas flow generation cavity (M11) includes a side connecting portion (M110) and a nozzle portion (M111) in spatial communication with each other. The side connecting portion (M110) is connected to the gas guiding portion (M4). The nozzle portion (M111) is connected to the delivering cavity (M10). The nozzle portion (M111) is configured for generating a pushing gas-flow (PA) in a pre-determined path (PR) toward the delivering cavity (M10). A pre-determined angle (PG) between 0-89 degrees is between the pre-determined path (PR) and central axis (CA) of the device body (M1).