Angled Grating Etching for Rolling K-Vector Slant Control
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Solution Overview
Problem
Existing angled etch systems face challenges in forming gratings with fins having modulated slant angles, which are required for optical devices like waveguide combiners, as changing the optimized angle necessitates reconfiguration of hardware and is difficult to control for varied slant angles across regions.
Innovation Solution
The method involves positioning different portions of a substrate at varying beam angles, tilt angles, and rotation angles within an ion beam path to form gratings with distinct slant angles, using a variable angle etch system that includes a triode extraction assembly and actuated deflector plates to modulate the ion beam angle and focus it at specific angles relative to the substrate normal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the ion beam angle is changed to form gratings with different slant angles, then the slant angle of fins is improved, but the hardware configuration must be reconfigured
Solution Approach 1:
The patent applies the dynamics principle by making the ion beam angle adjustable and variable during the etching process. The ion beam source is configured to dynamically change its beam angle to form gratings with different slant angles without requiring hardware reconfiguration. This allows the system to adapt to different optical device requirements by varying the beam angle parameter in real-time, resolving the contradiction between achieving different slant angles and maintaining fixed hardware configuration.
2Manufacturing precision
If the ion beam angle is modulated to form gratings with varied slant angles across regions, then the light in-coupling and out-coupling control is improved, but the process complexity increases
Solution Approach 1:
The patent applies the local quality principle by enabling different regions of the substrate to receive ion beams at different angles, thereby creating gratings with spatially varying slant angles. This allows each region to be optimized for specific light in-coupling or out-coupling requirements. The system achieves local optimization of optical performance by modulating the beam angle across different substrate regions, resolving the contradiction between improved light control and process complexity through localized parameter variation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the precise formation of gratings with rolling k-vector slant angles, enabling improved light in-coupling and out-coupling control in optical devices by modulating the slant angles of fins across the substrate, enhancing the performance of optical components.
Implementation Method 1
The ion beam contacts the grating material at a first ion beam angle θ relative to a surface normal of the substrate and forms one or more first gratings in the grating material with a first slant angle θ′
Data Source
AI summary
Embodiments described herein relate to methods and apparatus for forming gratings having a plurality of fins with different slant angles on a substrate and forming fins with different slant angles on successive substrates using angled etch systems and/or an optical device. The methods include positioning portions of substrates retained on a platen in a path of an ion beam. The substrates have a grating material disposed thereon. The ion beam is configured to contact the grating material at an ion beam angle ϑ relative to a surface normal of the substrates and form gratings in the grating material.