Sensor Unit with Angled Nanochannel Electrodes for Nucleotide Detection
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Solution Overview
Problem
Existing nucleic acid analysis methods face challenges in achieving precise detection and efficient measurement of current flow due to limitations in electrode spacing and alignment, which affect the accuracy of nucleotide identification.
Innovation Solution
A sensor unit is designed with electrodes arranged at an angle of 70° to 110° within a nanochannel, featuring an intermediate layer and chamfered edges to achieve precise nucleic acid analysis, allowing for a small electrode distance independent of lithography resolution limits, and utilizing a sacrificial layer and coating materials to form a closed nanochannel.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electrodes are spaced in the nanometer range to achieve precise nucleotide detection, then measurement precision improves, but manufacturing precision becomes more difficult due to lithography resolution limits
Solution Approach 1:
The patent transitions from planar electrode arrangement to a three-dimensional configuration where electrodes are positioned at angles (70°-110°) relative to each other within a nanochannel. This spatial reconfiguration allows the electrode distance to be determined by the thickness of the intermediate layer (1-10 nm) rather than by lithographic patterning, thereby decoupling manufacturing precision from lithography resolution limits while maintaining nanometer-scale detection precision
Solution Approach 2:
The patent introduces an intermediate layer between the first and second electrodes that serves as a mediator to define and control the electrode distance. This intermediate layer, with a thickness of 1-10 nm, acts as a spacer that precisely controls the separation between electrodes without requiring direct lithographic definition of the gap, thus resolving the contradiction between achieving nanometer-scale precision and overcoming manufacturing limitations
2Measurement precision
If electrode distance is reduced to enhance detection sensitivity, then measurement precision improves, but device complexity increases due to additional intermediate layers and chamfered structures
Solution Approach 1:
The patent divides the electrode structure into distinct functional segments: the first electrode, the intermediate layer, the second electrode, and chamfered regions. This segmentation allows each component to be independently optimized and manufactured, with the intermediate layer specifically tasked with defining the electrode distance. The complex geometry is broken down into manufacturable steps including deposition, structuring, and chamfering operations
Solution Approach 2:
The patent applies preliminary structuring operations to create chamfered edges on the electrodes and intermediate layer before final assembly. These chamfered structures (with angles of 0°-85°) are prepared in advance to facilitate precise alignment and controlled electrode spacing, reducing the complexity of the final assembly process while ensuring accurate nanometer-scale positioning
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise nucleic acid analysis by ensuring optimal electrode spacing for accurate current measurement, enhancing the detection of nucleotides in DNA and RNA sequencing.
Implementation Method 1
depositing an intermediate layer material to form an intermediate layer between the first and second electrodes such that the intermediate layer defines an electrode distance between the first and second electrodes
Implementation Method 2
partially under-etching the deposited and structured sacrificial layer to form the nano-channel
Implementation Method 3
depositing a coating material on the sacrificial layer to form a coating layer
Data Source
AI summary
A method for producing a sensor unit for nucleic acid analysis having a first electrode and a second electrode in a nanochannel, the method includes arranging a main direction of extension of the nanochannel at an angle γ from about 70° to about 110° to a direction of extension of edges of exposed surface portions of the first and second electrodes.


