Angled Photolithography Optics for Light Guide Element Fabrication
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Solution Overview
Problem
Current photolithography methods are inefficient and time-consuming in fabricating angled structures in photoresist materials due to challenges in achieving desired refractive angles, particularly when the medium between the light source and photoresist is air, making it difficult to expose angled structures effectively.
Innovation Solution
A fabrication system using an optical component with mirrors and a light-coupling material to manipulate light for exposing angled and vertical structures in photoresist materials, allowing for rapid and efficient fabrication by refracting light at desired angles through the use of mirrors and an aperture mask to direct light appropriately.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional photolithography methods are used to expose angled structures in photoresist material, then the fabrication process can be performed with simple equipment, but the process becomes inefficient and time-consuming due to difficulty in achieving desired refractive angles
Solution Approach 1:
A liquid immersion medium with refractive index n1 is introduced between the light source and photoresist material to enable efficient exposure of angled structures. The immersion medium acts as an intermediary that allows light to be refracted at desired angles according to Snell's law, solving the problem of achieving proper exposure angles while maintaining fabrication efficiency
Solution Approach 2:
The patent introduces a new dimensional parameter - the refractive index of the medium between light source and photoresist - to control the exposure angle. By changing from air (n≈1) to liquid immersion medium (n>1), the system gains an additional degree of freedom in controlling light refraction angles, enabling efficient angled structure fabrication
2Manufacturing precision
If light is exposed at normal incidence to photoresist material, then the exposure process is simple, but angled structures cannot be effectively fabricated
Solution Approach 1:
The patent changes the operational parameters of the exposure system by introducing a liquid immersion medium with specific refractive index properties. This parameter change enables light to be incident at non-normal angles while still achieving precise exposure of angled structures, as the immersion medium's refractive index controls the refraction angle according to Snell's law
Solution Approach 2:
The patent replaces the mechanical approach of physically tilting the photoresist or light source with an optical approach using liquid immersion. Instead of mechanically changing the geometry, the system uses the optical properties of the immersion medium to achieve the desired exposure angles, simplifying the operational complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables the rapid and efficient fabrication of optical elements with angled and vertical structures, improving production efficiency compared to existing methods.
Implementation Method 1
A fabrication system uses an optical component with mirrors and a light-coupling material to manipulate light for exposing angled and vertical structures in photoresist materials, allowing for rapid and efficient fabrication by refracting light at desired angles
Implementation Method 2
A fabrication system uses an optical component with mirrors and a light-coupling material to manipulate light for exposing angled and vertical structures in photoresist materials
Implementation Method 3
A fabrication system uses an optical component with mirrors and a light-coupling material to manipulate light for exposing angled and vertical structures in photoresist materials
Data Source
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AI summary
Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example system may include an optical component configured to direct light from a light source to illuminate a photoresist material at a desired angle and to expose at least a portion of an angled structure in the photoresist material, where the photoresist material overlays at least a portion of a top surface of a substrate. The optical component includes a container containing an light-coupling material that is selected based in part on the desired angle. The optical component also includes a mirror arranged to reflect at least a portion of the light to illuminate the photoresist material at the desired angle.