Angled Pipe Plate Layout to Prevent Vent Hole Obstruction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The obstruction of orifice plates in pipe assemblies by large particles from semiconductor dry etch processes leads to increased exhaust pressure and pump failure, necessitating a solution to redirect these particles and maintain consistent pump operation.
Innovation Solution
A pipe assembly design featuring a plate angled relative to the radial axis of the first pipe, with a vent hole proximal to the side opening, redirects large particles to a second pipe and collection reservoir, preventing obstruction and maintaining consistent exhaust pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If an orifice plate is used to filter large particles in residue, then particle filtration is improved, but the orifice plate becomes obstructed by large particles
Solution Approach 1:
The patent extracts the harmful function of the orifice plate by removing it from the system and replacing it with a filter assembly that performs particle filtration without the obstruction problem. The filter assembly separates the filtration function from the flow path, allowing particles to be captured without blocking the main exhaust flow.
Solution Approach 2:
The patent introduces a filter assembly as an intermediary component between the exhaust flow and the pump. This intermediary captures large particles before they can reach and obstruct the orifice plate or pump, while still allowing the exhaust gas to flow through to the abatement head.
2Object-affected harmful factors
If the orifice plate is obstructed, then particle filtration is improved, but exhaust pressure increases and pump fails
Solution Approach 1:
The patent performs preliminary action by capturing large particles in the filter assembly before they can travel downstream to obstruct the orifice plate or pump. This preventive filtration occurs upstream, eliminating the cause of subsequent pressure spikes and pump failures before they can occur.
Solution Approach 2:
The filter assembly serves as an intermediary that protects the pump and orifice plate from particle obstruction. It captures harmful particles in a controlled manner while maintaining stable exhaust flow to the pump, preventing the pressure spikes that lead to pump failure.
3Object-affected harmful factors
If a horizontal plate is used to redirect particles, then particle redirection is improved, but the vent hole becomes obstructed
Solution Approach 1:
The patent applies asymmetry by positioning the filter assembly off-center in the exhaust pipe, with the collection reservoir located at the bottom. This asymmetric arrangement allows gravity to drain collected particles downward into the reservoir while the vent hole remains positioned to avoid particle accumulation, preventing obstruction while maintaining effective particle redirection.
Solution Approach 2:
The patent adds the vertical dimension to particle redirection by using gravity-driven drainage to the bottom of the pipe. Instead of relying solely on horizontal plate geometry, the system uses vertical gravity flow to transport particles to the collection reservoir, eliminating the need for large horizontal surfaces that could obstruct vent holes.
4Reliability
If pump maintenance is increased to prevent failures, then pump reliability is improved, but productivity decreases
Solution Approach 1:
The patent implements self-service by having the filter assembly automatically capture and collect particles in the reservoir, preventing them from reaching and damaging the pump. This self-filtering mechanism reduces the frequency of pump maintenance required, allowing the pump to operate longer between service intervals without increasing failure risk.
Solution Approach 2:
The filter assembly performs preliminary particle capture before particles can cause pump wear or failure. By preemptively removing particles from the exhaust stream, the system extends pump life and reduces maintenance frequency, thereby maintaining continuous etching process productivity without compromising pump reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively redirects large particles, preventing vent hole obstruction and maintaining consistent pump operation, reducing interruptions and extending pump lifetime, thereby minimizing chamber maintenance and increasing labor efficiency.
Implementation Method 1
A plate in the first pipe may be arranged adjacent to the side opening and at an angle to a radial axis of the first pipe such that a first side of the plate may be lower than a second side
Data Source
AI summary
A pipe assembly is provided, the pipe assembly comprising a first pipe having a side opening on a side surface of the first pipe. A plate in the first pipe is arranged adjacent to the side opening and at an angle relative to a radial axis of the first pipe such that a first side of the plate may be lower than a second side. A vent hole may be proximal the side opening on the side surface of the first pipe.