Angled Pixel Grid Sidewalls for Light Collection and Crosstalk Isolation

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Solution Overview

Problem

CMOS image sensors face challenges in maximizing quantum efficiency due to optical crosstalk and light absorption by grid structures used to separate color filter regions, which reduces incident light collection and overall image sensor performance.

Innovation Solution

Implementing an angled or tapered grid structure in the pixel array, where the grid width approaches near-zero at the top surface to minimize spacing between color filter regions and increase light collection, while widening towards the bottom surface for optical crosstalk protection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a grid structure is used to separate color filter regions, then optical crosstalk between adjacent pixel sensors is reduced, but incident light is absorbed and reflected away from photodiodes, reducing quantum efficiency

Engineering Contradiction:
Improveoptical crosstalkVSAvoidquantum efficiency
Core Design Contradiction:
Object-affected harmful factorsVSLoss of energy

Solution Approach 1:

The grid structure employs asymmetric geometry with a top surface at a first elevation and a bottom surface at a second elevation, creating non-uniform light interaction paths. This asymmetric design allows light to pass through the grid structure more effectively while still providing optical isolation between adjacent pixel sensors, thereby reducing both optical crosstalk and light absorption/reflection losses.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The grid structure extends in the vertical dimension with distinct top and bottom surfaces at different elevations, adding a third dimension to the optical isolation mechanism. This vertical dimensionality allows light to pass through the grid structure while maintaining separation between color filter regions, resolving the contradiction between optical crosstalk reduction and quantum efficiency maintenance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Loss of energy

If spacing between color filter regions is reduced, then quantum efficiency increases due to greater light collection surface area, but optical crosstalk protection decreases

Engineering Contradiction:
Improvequantum efficiencyVSAvoidoptical crosstalk
Core Design Contradiction:
Loss of energyVSObject-affected harmful factors

Solution Approach 1:

The asymmetric grid structure with different top and bottom elevations allows color filter regions to be positioned closer together while maintaining optical isolation. The vertical asymmetry creates effective optical barriers even at reduced horizontal spacing, enabling both high quantum efficiency and optical crosstalk protection.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The grid structure is formed from a dielectric material that provides both mechanical support and optical isolation properties. This composite approach combines structural integrity with optical functionality, allowing reduced spacing between color filter regions while maintaining effective optical crosstalk protection through the dielectric material's properties.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances quantum efficiency by increasing the surface area for light collection and reducing light absorption, while providing effective optical crosstalk protection, thereby improving the overall performance of the CMOS image sensor.

Implementation Method 1

A pixel sensor of the CMOS image sensor may include a photodiode region configured to convert photons of incident light into a photocurrent of electrons

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS20240021635A1Grid structure with at least partially angled sidewalls
Publication Date: 2024.01.18 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240021635A1 patent drawing
  • US20240021635A1 patent drawing
  • US20240021635A1 patent drawing

AI summary

A grid structure in a pixel array may be at least partially angled or tapered toward a top surface of the grid structure such that the width of the grid structure approaches a near-zero width near the top surface of the grid structure. This permits the spacing between color filter regions in between the grid structure to approach a near-zero spacing near the top surfaces of the color filter regions. The tight spacing of color filter regions provided by the angled or tapered grid structure provides a greater surface area and volume for incident light collection in the color filter regions. Moreover, the width of the grid structure may increase at least partially toward a bottom surface of the grid structure such that the wider dimension of the grid structure near the bottom surface of the grid structure provides optical crosstalk protection for the pixel sensors in the pixel array.