Angled Gas Plasma Mist Generator for Atmospheric Thin Film Deposition
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Solution Overview
Problem
Conventional thin film manufacturing methods, such as vapor deposition, often require expensive and large vacuum-based equipment, which increases costs and complexity.
Innovation Solution
A mist generator system that includes a container for a liquid, a gas supply unit, and an electrode that generates plasma between the electrode and the liquid, where the gas supply direction is angled relative to the gravitational direction, allowing for efficient mist formation and thin film deposition without the need for a vacuum environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If vacuum-based vapor deposition methods are used, then thin film formation is achieved, but equipment size and cost increase
Solution Approach 1:
The invention changes the working environment parameter from vacuum to atmospheric pressure, eliminating the need for vacuum chambers while maintaining effective thin film deposition through plasma-enhanced chemical vapor deposition of precursor liquids
Solution Approach 2:
The invention utilizes phase transition of precursor materials from liquid to vapor through heating, and the deposition phase from vapor to solid film on the substrate, enabling thin film formation without vacuum equipment
2Productivity
If gas is supplied directly toward the liquid level, then mist generation is efficient, but liquid level instability occurs
Solution Approach 1:
The gas supply direction is set at an angle of 45 degrees or more relative to the liquid level surface, creating asymmetric gas flow that generates mist efficiently while avoiding direct impact on the liquid level, thus maintaining stability
Solution Approach 2:
The gas supply is directed toward the side surface of the container rather than directly at the liquid level, utilizing the vertical dimension to achieve mist generation without disturbing the liquid level stability
3Quantity of substance
If the gas supply opening faces the liquid level, then gas-liquid interaction is maximized, but plasma generation stability decreases
Solution Approach 1:
The gas supply opening is oriented at an angle of 45 degrees or more relative to the liquid level surface, creating asymmetric interaction that provides sufficient gas-liquid contact for mist generation while preventing direct gas flow disruption of the plasma generation region
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the formation of thin films on substrates using a more cost-effective and compact system, improving dispersibility of particles and reducing equipment size and expense by utilizing on-water plasma to convert liquids into mists for deposition.
Implementation Method 1
an electrode that generates plasma between the electrode and the liquid
Data Source
AI summary
Provided is a mist generator including: a container that stores a liquid; a gas supply unit that supplies a gas into the container; and an electrode that generates plasma of the gas between the electrode and the liquid, where the supply direction of the gas fed from the gas supply opening of the gas supply unit is different from a direction in which gravity acts.