Angled Pulling Force Mechanism for Imprint Separation
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Solution Overview
Problem
Current methods for separating objects in a sandwich structure, such as a stamp from a substrate in lithographic processes, are often manual and inefficient, particularly for fine-scale microelectronics and micromechanics where precise separation is required.
Innovation Solution
An apparatus and method utilizing a support structure with fastening means for gripping objects and a pulling force mechanism that applies a force angled to the normal direction, along with a cutting mechanism to insert a cutting edge between the objects, facilitating separation through vacuum suction and controlled positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual separation methods are used, then operation simplicity is maintained, but productivity is reduced and reliability is compromised
Solution Approach 1:
The separation apparatus divides the separation process into distinct functional segments: fastening means for securing objects, positioning mechanism for precise alignment, cutting mechanism for initial separation, and pulling force mechanism for final detachment. Each segment performs a specific function, enabling automated high-precision separation while maintaining manageable system complexity through modular design
Solution Approach 2:
The apparatus introduces intermediary mechanisms (positioning mechanism, cutting mechanism) that mediate between the fastening means and the objects to be separated. These intermediaries enable controlled separation by first positioning the cutting edge precisely, then applying localized cutting force before the pulling force mechanism completes the separation, thereby automating the process without requiring direct manual intervention
2Manufacturing precision
If cutting edge insertion is used, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The cutting mechanism is merged with the positioning mechanism such that the cutting edge is automatically positioned and inserted between the objects without requiring separate manual operations. The pulling force mechanism is also integrated to immediately follow the cutting action, combining multiple functions (positioning, cutting, pulling) into a coordinated automated sequence that achieves high precision while managing overall device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable and efficient separation of firmly attached objects, particularly in post-imprint processes, by ensuring secure gripping and controlled displacement, reducing the risk of damage and improving precision in microelectronics and micromechanics.
Implementation Method 1
The first and second gripping means each comprise a seal and an aperture located on the inner side of the seal, connected to a vacuum supply system, for gripping an object surface by suction
Data Source
AI summary
An apparatus and method are provided for separating two objects attached to each other in a sandwich structure, such as a stamp and a substrate pressed together in an imprint process. The apparatus includes a support structure, carrying first fastening means having a base surface and first gripping means for supporting and holding a first object, second fastening means, positioned opposite to the first fastening means, having second gripping means for holding a second object, and a pulling force mechanism to provide a pulling force at an angle to the normal direction of the base surface for displacing the two fastening means away from each other. Preferably, the second object is gripped at a periphery portion, and the pulling force is angled inwardly from said periphery portion.