Imprint Apparatus Angled Resin Dispensing for Bubble Trapping
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Solution Overview
Problem
In imprint technology, the occurrence of unfilled portions in contoured patterns on substrates is a challenge due to bubble trapping during the resin filling process, especially when using low-viscosity resins for micron-scale features, which affects the evenness of the resin film thickness and throughput.
Innovation Solution
An imprint apparatus that applies resin drops at angled positions relative to the principal axis direction of the contoured pattern, using a controller to determine optimal application positions and angles for efficient filling, thereby reducing the occurrence of unfilled areas and enhancing throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If resin is applied using an inkjet method for each shot, then the resin can be applied precisely to the shot area, but bubbles easily become trapped in the uncured resin between the mold and substrate
Solution Approach 1:
The invention changes the physical parameters of the resin by heating it to reduce viscosity. This allows the resin to flow more easily and fill the mold cavity completely before curing, preventing bubble entrapment while maintaining precise application through the inkjet method
Solution Approach 2:
The resin is heated to reduce its viscosity before application and molding. This preliminary action of reducing viscosity ensures that the resin flows properly during the molding process, filling fine contours completely and preventing bubble entrapment before the resin cures
2Reliability
If the amount of resin drops is increased at locations where bubbles are retained, then bubble retention is suppressed, but the evenness of the remaining film thickness after imprint is affected
Solution Approach 1:
Instead of changing the amount of resin, the invention changes the temperature parameter to reduce resin viscosity. This allows the existing resin amount to spread more uniformly and fill the mold cavity completely, suppressing bubble retention while maintaining even film thickness
Solution Approach 2:
The invention replaces the mechanical approach of adding more resin with a thermal approach of heating the resin. This substitution allows for better control of resin flow and distribution, achieving complete mold filling without disrupting film thickness uniformity
3Manufacturing precision
If low viscosity resin is used to fill fine contoured pattern, then the resin can be filled reliably into the pattern, but bubbles easily become trapped in the uncured resin
Solution Approach 1:
The invention dynamically changes the temperature parameter of the resin during the process. The resin is heated to reduce viscosity for complete pattern filling, then the temperature is controlled to manage viscosity during molding to prevent bubble entrapment, and finally cooled for curing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach shortens the spreading time of resin drops during pressing, suppresses unfilled portions, and maintains uniform film thickness, thereby improving the productivity and quality of the imprint process.
Implementation Method 1
the resin must have a low viscosity... When the resin has a low viscosity, applying in advance a resist (in this case, the resin) to all shots on the substrate as is done
Implementation Method 2
an ultraviolet light-cured resin (imprint material, photo-cured resin) is applied to a shot... by separating the resin after curing the resin by irradiating ultraviolet light
Data Source
AI summary
Provided is an imprint apparatus that applies a resin (drops) dispersed at a plurality of locations on a substrate, brings the resin and a mold into contact, and transfers the contoured pattern that is formed in the mold to the resin comprising: a controller that sets a principal axis direction according to the contoured pattern and an array direction in which a plurality of resin drops are aligned, and determines application positions for the resin such that the array direction is angled with respect to the principal axis direction; and a dispenser that applies the resin based on the application positions that have been determined.