Angled Sensor Chips in Membrane Pressure Sensors for Stress Compensation
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Solution Overview
Problem
Existing pressure sensors are susceptible to mechanical stresses from fastening and installation, which influence measurement results and signals, limiting accuracy.
Innovation Solution
The pressure sensor design incorporates at least two sensor chips on the membrane, spaced apart and angled, with measuring bridges connected in parallel to compensate for mechanical stresses from fastening, ensuring the measurement result is not affected.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If sensor chips are arranged on the membrane edge to increase sensitivity, then measurement sensitivity is improved, but mechanical stresses from fastening affect measurement results
Solution Approach 1:
The sensor chip is divided into multiple independent sensor elements (first and second sensor elements) that are spaced apart from each other. This segmentation allows the chip to respond differently to various stress directions, enabling the system to distinguish between pressure-induced deformation and mechanical stress artifacts.
Solution Approach 2:
The first and second sensor elements are arranged asymmetrically with respect to the membrane normal, positioned at different locations and orientations. This asymmetric arrangement creates different sensitivity patterns for each sensor element, allowing the system to compensate for mechanical stresses by comparing their responses.
2Reliability
If symmetrical arrangements of measuring elements are used, then resistance to external parasitic error influences is improved, but sensitivity to measured pressure is limited
Solution Approach 1:
Different regions of the sensor chip have different properties: the first sensor element is positioned to be more sensitive to pressure in one direction, while the second sensor element is positioned to be more sensitive to pressure in another direction. This local differentiation allows the system to maintain high sensitivity while using the differential response to compensate for mechanical stresses.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The compensation mechanism effectively neutralizes mechanical stresses, maintaining accurate measurement by averaging stress effects with opposite signs, thereby enhancing sensor reliability.
Implementation Method 1
The pressure sensor device comprises a membrane (1) having sensor chips (2, 3) having measuring bridges having sensor elements
Data Source
AI summary
The invention relates to pressure sensors having a membrane having sensor chips having measuring bridges having sensor elements, wherein the membrane is fastened in a housing, with a carrier or as part of a housing, to which membrane a working medium can be applied. The pressure sensors are characterised in particular in that the mechanical stresses resulting from a fastening and/or an installation of the pressure sensors do not influence the measurement result and/or the measurement signal. To this end, at least two sensor chips, which are spaced apart from one another and are offset at an angle to one another, are located at least on a side of the membrane that bends on application of pressure. The measuring bridges are designed and/or connected to a controller in such a manner that at least one force resulting from the fastening of the membrane and thus acting on the membrane is or will be compensated.