Angled Growth Template for Oriented 2D Crystal Nucleation

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Solution Overview

Problem

The deposition of transition metal dichalcogenide crystals with controlled crystalline structure and morphology remains a challenge, limiting their potential as alternative channel materials for continued transistor scaling in computing-intensive applications like IoT and AI, where energy efficiency and cost performance are critical.

Innovation Solution

A template with a flat surface and angled walls is used to grow two-dimensional material crystals, where the walls' dimensions and angles are optimized to align with the crystal structure, preventing vertical growth and promoting seamless coalescence, thereby controlling the seeding and orientation of crystals during nucleation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional deposition methods are used for two-dimensional material crystals, then the deposition process is simple, but control over crystalline structure, morphology and material properties remains challenging

Engineering Contradiction:
Improvecontrol over crystalline structure and morphologyVSAvoidcomplexity of deposition process
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent introduces an intermediary template structure with specific geometric features (corner angles matching crystal lattice parameters) that mediates between the deposition process and the desired crystal morphology. This template acts as a mediator that guides atom deposition and facilitates controlled crystal growth without requiring complex in-situ control mechanisms

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The template is pre-formed with specific geometric characteristics (corner angles α, β, γ matching the crystal structure) before the deposition process. This preliminary preparation of the substrate geometry enables subsequent controlled crystal growth without requiring complex real-time adjustments during deposition

Inventive Principle:
Principle #10Preliminary action

2Strength

If the walls of the template have height greater than 2 nm, then the template structure is more robust, but vertical growth of two-dimensional material on the walls increases

Engineering Contradiction:
Improverobustness of template structureVSAvoidvertical growth morphology
Core Design Contradiction:
StrengthVSShape

Solution Approach 1:

The patent optimizes the wall height parameter to a specific range (0.6 nm to 2 nm) that balances structural robustness with growth control. This parameter optimization prevents vertical growth while maintaining sufficient mechanical strength of the template structure

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If the angle opening does not align with the crystal structure, then the template design is more flexible, but the crystal growth orientation and quality are compromised

Engineering Contradiction:
Improveflexibility of template designVSAvoidcrystal growth orientation and quality
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent applies local quality by designing specific corner regions of the template with precise angular characteristics (α, β, γ angles) that match the local crystal structure requirements. This localized geometric optimization at critical corners enables high-quality crystal growth while maintaining overall template design flexibility

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the formation of high-quality, monocrystalline crystals with low grain boundary density and large monocrystal sizes, enabling precise crystal placement on substrates and reducing defects in device fabrication.

Implementation Method 1

controlling the seeding and orientation of crystals during nucleation

Methodology Applied
Scientific EffectNucleation: Nucleation

Implementation Method 2

growing a crystal of a two-dimensional material

Methodology Applied
Scientific EffectCrystallisation: Crystallisation

Data Source

PatentEP4306685A1Template for growing a crystal of a two-dimensional material
Publication Date: 2024.01.17 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • EP4306685A1 patent drawingFigure 1A~3B
  • EP4306685A1 patent drawingFigure 4A~5F
  • EP4306685A1 patent drawingFigure 6

AI summary

A template (1) for growing a crystal (3) of a two-dimensional material, comprising: a. a flat surface (2) for growing the crystal (3) thereon, b. a first wall (4a) on the flat surface (2), and c. a second wall (4b) on the flat surface (2), wherein the first and the second walls (4a, 4b) meet at a corner (5) to form an angle (α) having an opening that is adapted to align with the crystal structure of said crystal (3) with a tolerance of up to 5°, wherein each of the first and second wall (4b) has a length of from 5 nm to 1000 nm and a height (h) of from 0.6 nm to 2 nm.