Accurate Raman Spectroscopy with Angular-Resolved Nano-Scale Analysis

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Solution Overview

Problem

Conventional Raman spectroscopy systems are limited by their single illumination direction, reducing the information obtainable from Raman spectra, particularly in characterizing nano-scale structures.

Innovation Solution

A system and method for Raman spectroscopy that allows illumination and collection of Raman scattered light from nano-scale structures at various angles and polarizations, using polarization optics to control illumination and extraction of specific spectra, enabling detailed analysis of nano-scale materials.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of information

If conventional Raman spectroscopy uses single illumination direction, then the system is simple, but the information obtained from Raman spectra is reduced

Engineering Contradiction:
Improveinformation from Raman spectraVSAvoidsystem complexity
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

The patent introduces angular resolution by measuring Raman spectra at multiple scattering angles (0°, 30°, 60°, 90°) in addition to the conventional single-angle measurement. This adds a new dimension to the data collection, enabling extraction of additional information about crystal orientation, strain, and phonon modes that cannot be obtained from single-angle measurements alone.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The system dynamically adjusts illumination and collection angles during measurement to capture Raman spectra at multiple orientations. The ability to rotate sample stages or optical components allows the system to adaptively measure at different angles, providing comprehensive information about the sample's properties from multiple perspectives.

Inventive Principle:
Principle #15Dynamics

2Measurement precision

If Raman spectroscopy measures only at single illumination direction, then the measurement process is simple, but the characterization of nano-scale structures is limited

Engineering Contradiction:
Improvecharacterization accuracy of nano-scale structuresVSAvoidmeasurement operation simplicity
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

By introducing angular resolution with measurements at multiple scattering angles (0°, 30°, 60°, 90°), the system gains precise information about nano-scale structure characteristics such as crystal orientation, strain distribution, and phonon mode properties. This multi-angle approach provides dimensional information that single-angle measurement cannot capture.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The measurement process is segmented into multiple independent angular components, with each angle providing specific information about different aspects of the nano-structure. This segmentation allows systematic extraction of various properties (strain, composition, orientation) from the angularly-resolved spectra.

Inventive Principle:
Principle #1Segmentation

3Loss of information

If comprehensive Raman spectra are collected from multiple angles, then detailed material information is obtained, but the measurement time increases

Engineering Contradiction:
Improvematerial property informationVSAvoidmeasurement time
Core Design Contradiction:
Loss of informationVSLoss of time

Solution Approach 1:

The system employs periodic scanning of illumination and collection angles to systematically collect Raman spectra at multiple orientations. By organizing measurements in a periodic angular sequence (0°, 30°, 60°, 90°), the system efficiently captures comprehensive material information while managing measurement time through structured data collection.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the collection of comprehensive Raman spectra from nano-scale structures by resolving scattering angles, providing detailed information on material properties and dimensions.

Implementation Method 1

collection and interpretation of angle resolved Raman scattered light from Raman-active materials, micro-structures and nano-structures

Methodology Applied
Scientific EffectRaman scattering: Scattering

Implementation Method 2

using polarization optics to control illumination and extraction of specific spectra

Methodology Applied
Scientific EffectPolarization: Polarisation

Data Source

PatentUS12372473B2Accurate Raman spectroscopy
Publication Date: 2025.07.29 NOVA MEASURING INSTR LTD
  • US12372473B2 patent drawing
  • US12372473B2 patent drawing
  • US12372473B2 patent drawing

AI summary

A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up