Angular Rate Sensor Ageing Stabilization via Capacitance Matching

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Solution Overview

Problem

MEMS angular velocity sensors using PZT transducers face limitations due to ageing and temperature drifts, leading to gain variations and phase accuracy issues, which restrict their use to low-performance applications with short timescale stability, such as in GPS aided navigation systems.

Innovation Solution

The design incorporates primary and secondary sensor elements with different volumes of material, where the primary element is smaller and includes extra padding capacitance to match capacitances between channels, minimizing the impact of material deterioration on gain and stabilizing the sensor against ageing and hysteresis effects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If PZT transducers are used to achieve high signal levels and good signal-to-noise ratio, then the sensor performance is improved, but ageing and temperature drifts cause gain variations and phase accuracy issues

Engineering Contradiction:
Improvesignal to noise ratioVSAvoidageing stability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent changes the physical parameters of the PZT transducers by creating asymmetric volumes between primary and secondary elements, and adjusting capacitance values to achieve frequency matching. This parameter optimization reduces the impact of ageing and temperature drifts on gain variations and phase accuracy, thereby improving reliability while maintaining high signal-to-noise ratio performance

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If PZT transducer volume is increased to improve signal level, then signal to noise ratio is improved, but capacitance mismatch between primary and secondary channels increases

Engineering Contradiction:
Improvesignal levelVSAvoidcapacitance matching
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent applies local quality by making the primary and secondary PZT transducers asymmetric in volume while compensating with additional capacitance in the primary channel. This localized capacitance adjustment ensures that despite different volumes and signal levels, the capacitances are matched between channels, eliminating quadrature errors while maintaining high signal levels

Inventive Principle:
Principle #3Local quality

3Reliability

If temperature compensation is added to correct thermal instabilities, then temperature drift is reduced, but device complexity increases

Engineering Contradiction:
Improvetemperature stabilityVSAvoidcompensation system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent implements self-service by designing the sensor with inherently symmetric capacitance characteristics through optimized PZT transducer geometry and matching. This self-compensating design eliminates the need for external temperature compensation systems, achieving temperature stability while maintaining simple device architecture

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively stabilizes the scale factor of the gyroscope against ageing and hysteresis, ensuring improved accuracy and reliability by matching the capacitances and gains between primary and secondary channels, thereby overcoming the limitations of PZT transducers.

Implementation Method 1

Typically the MEMS ring type structures are formed from crystalline silicon and incorporate transducers formed from Lead Zirconate Titanate (PZT) materials

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

angular velocity sensors incorporating a MEMS type ring are known... for detecting turning rate, linear acceleration and angular acceleration. Turning rate is sensed by detecting vibrations coupled by Coriolis forces

Methodology Applied
Scientific EffectCoriolis force: Coriolis Force

Implementation Method 3

the primary channel comprising primary driver means for initiating and maintaining resonant oscillations in the primary sensor elements

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentEP2572162B1Angular rate sensor with improved ageing properties
Publication Date: 2017.08.16 SILICON SENSING SYST
  • EP2572162B1 patent drawingFigure 1
  • EP2572162B1 patent drawingFigure 2
  • EP2572162B1 patent drawingFigure 3a

AI summary

An angular velocity sensor is described with improved ageing and hysteresis properties. The sensor may be of a ring type driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The gain of the primary pickoff signal and the capacitance of the primary portions of the sensor are controlled relative to the gain of the secondary pickoff and the capacitance of the secondary portions of the sensor. Control electronics is provided that enables matching of the relative signals from the respective channels. In this way, temperature hysteresis and ageing effects of materials used in forming the sensor are overcome.