Angular Rate Sensor Quadrature Error Compensation

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Solution Overview

Problem

Vibratory angular rate sensors face quadrature error due to manufacturing imperfections, leading to offset errors, reduced dynamic range, increased noise, and potential mechanical damage from electrostatic compensation techniques that require large voltages and precise phase matching.

Innovation Solution

Implementing quadrature compensation electrodes in reverse polarity with the sense electrodes associated with the drive mass, which reduces capacitance output and compensates for quadrature error without using electrostatic force.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If electrostatic force is applied via quadrature compensation electrodes to compensate for quadrature error, then quadrature error is reduced, but large voltage is required and device complexity increases

Engineering Contradiction:
Improvequadrature error compensationVSAvoidelectrostatic compensation system
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces the electrostatic force-based compensation system with a mechanical solution. Quadrature compensation masses are mechanically coupled to the drive mass through flexible support elements, allowing passive mechanical compensation of quadrature error without requiring large voltages or complex electrostatic control systems

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The quadrature compensation masses automatically compensate for quadrature error through their mechanical coupling to the drive mass. The system self-regulates through the mechanical interaction between the compensation masses and drive mass, eliminating the need for external control systems or precise phase matching

Inventive Principle:
Principle #25Self-service

2Measurement precision

If electrostatic force is applied for quadrature compensation, then quadrature error is reduced, but large voltage is required which increases energy consumption

Engineering Contradiction:
Improvequadrature error compensationVSAvoidvoltage requirement
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The patent replaces the electrostatic force-based compensation system with a mechanical solution. Quadrature compensation masses are mechanically coupled to the drive mass through flexible support elements, allowing passive mechanical compensation of quadrature error without requiring large voltages or complex electrostatic control systems

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the compensation mechanism from electrical (electrostatic force requiring large voltage) to mechanical (passive mass-spring system). This parameter change eliminates the high voltage requirement and associated energy consumption while maintaining compensation effectiveness

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If precise phase matching is required for electrostatic compensation, then quadrature error is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvequadrature error compensationVSAvoidphase matching precision
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent replaces the electrostatic force-based compensation system with a mechanical solution. Quadrature compensation masses are mechanically coupled to the drive mass through flexible support elements, allowing passive mechanical compensation of quadrature error without requiring large voltages or complex electrostatic control systems

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The quadrature compensation masses automatically compensate for quadrature error through their mechanical coupling to the drive mass. The system self-regulates through the mechanical interaction between the compensation masses and drive mass, eliminating the need for external control systems or precise phase matching

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively cancels quadrature error signals, enhancing the accuracy and reliability of angular rate sensors by minimizing mechanical motion and eliminating the need for precise phase matching and large voltage applications.

Implementation Method 1

The quadrature compensation electrodes are coupled in reverse polarity with the sense electrodes such that a first error component between the quadrature compensation electrodes and the drive mass substantially cancels a second error component between the sense electrodes and the sense mass

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentEP2685211B1Angular Rate Sensor With Quadrature Error Compensation
Publication Date: 2020.04.29 NXP USA INC
  • EP2685211B1 patent drawingFigure 1
  • EP2685211B1 patent drawingFigure 2~3
  • EP2685211B1 patent drawingFigure 4

AI summary

An angular rate sensor (20) includes a drive mass (36) flexibly coupled to a substrate (22). A sense mass (42) is suspended above the substrate (22) is and flexibly connected to the drive mass (36) via flexible support elements (44). A quadrature compensation electrode (24) is associated with the drive mass (36) and a sense electrode (28) is associated with the sense mass (42). The drive mass (36) and the sense mass (42) oscillate together relative to a sense axis (50) in response to quadrature error. The quadrature error produces a signal error component (78) between the quadrature compensation electrode (24) and the drive mass (36) and a signal error component (76) between the sense electrode (28) and the sense mass (42). The compensation and sense electrodes (24, 28) are coupled in reverse polarity so that the signal error component (78) substantially cancels the signal error component (76).