Angular Velocity Sensor with Cross-Shaped Vibrator

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Solution Overview

Problem

Existing angular velocity sensors are unable to measure angular velocities around all three axes of a Cartesian coordinate system without increasing package size or cost, and suffer from reduced detection sensitivity and accuracy due to torque applied by weight vibrations and external stress or temperature changes.

Innovation Solution

An angular velocity sensor is designed with a central base and equiangularly arranged detection beam portions, where drive beam portions are connected between adjacent detection beam portions and include weights, allowing for vibrations to be kept within the sensor, enhancing detection sensitivity and accuracy by canceling out vibrations and reducing external influence.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If traditional angular velocity sensor configurations are used, then the sensor can measure angular velocities, but it cannot measure angular velocities around all three axes without increasing package size or cost

Engineering Contradiction:
Improvemeasurement capabilityVSAvoidpackage size
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent implements a single vibrator structure that can measure angular velocities around all three axes (x, y, and z axes) by utilizing the Coriolis force effects in different directions. The vibrator includes drive beam portions and detection beam portions arranged to enable measurement of angular velocities in multiple directions without requiring separate sensors for each axis, thus achieving multi-functionality while maintaining compact package size.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If weight parts are used in the vibrator, then the sensor can detect angular velocities, but the weight vibrations apply torque to the support part reducing detection sensitivity and accuracy

Engineering Contradiction:
Improvedetection sensitivityVSAvoidtorque from weight vibrations
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent extracts the weight function from the drive beam portions and integrates it into the detection beam portions. The detection beam portions are equipped with weight parts that are specifically positioned to generate detectable vibrations without applying harmful torque to the support part. This separation of functions allows the sensor to maintain high detection sensitivity while eliminating the harmful effects of weight vibrations on the support structure.

Inventive Principle:
Principle #2Taking out (Extraction)

3Measurement precision

If the vibrator is driven to vibrate in specific modes, then angular velocities can be measured, but external stress or temperature changes cause vibrations that reduce detection accuracy

Engineering Contradiction:
Improvedetection accuracyVSAvoidexternal stress and temperature changes
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent employs asymmetric arrangement of detection beam portions and weight parts to create a vibration isolation mechanism. The detection beam portions are positioned and oriented such that their vibration characteristics are inherently resistant to external stress and temperature changes. This asymmetric design allows the sensor to maintain accurate detection by canceling out spurious vibrations caused by external factors while preserving the ability to detect angular velocities.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor effectively measures angular velocities around all three axes with improved sensitivity and accuracy, minimizing the impact of external vibrations and temperature changes, while maintaining a compact size and low cost.

Implementation Method 1

the vibrator includes a central base portion, four detection beam portions, and four drive beam portions... Each of the four drive beam portions is connected to adjacent ones of the four detection beam portions... The vibrator is driven to vibrate so that the four drive beam portions are displaced in the respective radial directions

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Implementation Method 2

measures angular velocities based on detected vibrations generated by the action of a Coriolis force in a vibrator driven and vibrating along a plate surface of the vibrator

Methodology Applied
Scientific EffectCoriolis force: Coriolis Force

Data Source

PatentUS10072930B2Angular velocity sensor
Publication Date: 2018.09.11 MURATA MFG CO LTD
  • US10072930B2 patent drawing
  • US10072930B2 patent drawing
  • US10072930B2 patent drawing

AI summary

A vibrator of an angular velocity sensor includes detection beam portions extending from a central base portion in a cross shape, and drive beam portions between and connected to two adjacent detection beam portions. Each of the detection beam portions includes a base-end detection beam connected to the central base portion, and a left detection beam and a right detection beam. The left detection beam is connected to one of the drive beam portions that is located on the left of the corresponding one of the detection beam portions, and the right detection beam is connected to one of the drive beam portions that is located on the right of the corresponding one of the detection beam portions. The drive beam portions are driven to vibrate in a direction toward the central base portion and a direction away from the central base portion so that each two facing ones of the drive beam portions are in the same phase and each two adjacent ones of the drive beam portions are in the opposite phases.