Angular Velocity Sensor with Folding Beam for Multi-Axis Detection
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Solution Overview
Problem
Conventional inertial force sensors require a large mounting area and multiple sensors to detect various inertial forces and axes, making them bulky and inefficient for use in electronic devices like posture controllers and navigation systems.
Innovation Solution
A compact inertial force sensor design featuring a detecting device with a first orthogonal structure and a supporting portion, including a support beam and a centrally-supported beam with a folding portion, which allows for the detection of multiple inertial forces and axes on a small mounting area by utilizing a silicon substrate with piezoelectric elements and electrodes to sense angular velocity and acceleration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple separate angular velocity sensors and acceleration sensors are mounted to detect inertial forces of multiple axes, then detection capability for multiple inertial forces is improved, but mounting area increases
Solution Approach 1:
The patent combines multiple detection functions (angular velocity detection and acceleration detection) into a single integrated sensor device. The detecting device includes both a detecting portion for angular velocity and a weight portion for acceleration detection, allowing multiple inertial forces to be detected simultaneously within one compact structure, thereby reducing the total mounting area required.
Solution Approach 2:
The sensor device is designed with multi-functionality to detect various types of inertial forces including angular velocity around different axes and acceleration in different directions. The detecting device can detect angular velocity around a first axis and a second axis, as well as acceleration, making it a universal sensor that replaces multiple specialized sensors.
2Measurement precision
If multiple separate sensors are used to detect inertial forces of multiple axes, then detection precision for each axis is improved, but device complexity increases
Solution Approach 1:
The patent merges multiple detection functions into a single integrated detecting device structure. The device includes a detecting portion with beam structures for angular velocity detection and a weight portion for acceleration detection, all integrated within one sensor unit. This reduces device complexity by eliminating the need for multiple separate sensor configurations while maintaining detection precision through the integrated design.
3Area of stationary object
If a compact sensor design is implemented, then mounting area is reduced, but detection sensitivity may deteriorate
Solution Approach 1:
The patent utilizes three-dimensional spatial arrangement within the detecting device to maintain detection sensitivity while reducing mounting area. The beam structures are arranged in specific spatial configurations (first beam structure and second beam structure at different orientations) that allow compact integration without compromising the sensitivity required for accurate angular velocity and acceleration detection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enables high-sensitivity detection of multiple inertial forces and axes on a reduced mounting area, enhancing the miniaturization and sensitivity of the sensor, suitable for various electronic devices.
Implementation Method 1
utilizing a silicon substrate with piezoelectric elements and electrodes to sense angular velocity and acceleration
Implementation Method 2
The angular velocity sensor oscillates a detecting device in tuning fork shape, H shape, or T shape and then electrically detects distortion of the detecting device with occurrence of a Coriolis force to detect an angular velocity
Implementation Method 3
The acceleration sensor has a weight portion and compares and detects movement of the weight portion with acceleration with that before operation to detect acceleration
Data Source
AI summary
An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.