Angular Velocity Sensor Shock Resistance via Stopper
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Solution Overview
Problem
Angular velocity sensing elements with small oscillation arms made of semiconductor materials are prone to damage and breakage due to excessive shock, as they can exceed the breaking stress and experience impulsive forces that are difficult to mitigate, leading to loss of function.
Innovation Solution
Incorporating a stopper member to limit the oscillation range of the oscillation arms, either in the same plane or perpendicular to it, to prevent excessive oscillation and distribute impulsive forces, thereby preventing damage and breakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the oscillation arms are made smaller to reduce sensor size and height, then the sensor meets miniaturization requirements, but the oscillation arms become more susceptible to breakage under shock
Solution Approach 1:
The patent applies beforehand cushioning by providing a stopper member that limits the oscillation range of the oscillation arms before excessive shock can cause breakage. The stopper member is positioned to prevent the oscillation arms from reaching positions where they would experience breaking stress, thereby cushioning the system against potential damage in advance.
2Manufacturing precision
If machining is used to fabricate oscillation arms with high precision, then smaller size can be achieved, but the complexity and cost of manufacturing increase
Solution Approach 1:
The patent applies mechanics substitution by replacing traditional mechanical machining processes with semiconductor fabrication techniques. The oscillation arms are formed using photolithography, etching, and other semiconductor manufacturing processes, which enable precise dimensional control without the complexity and cost associated with precision mechanical machining.
3Measurement precision
If the oscillation range is increased to improve sensing capability, then measurement precision improves, but the risk of breakage under shock increases
Solution Approach 1:
The patent applies dynamics by making the oscillation range controllable and adaptive. The stopper member allows the oscillation arms to move through their normal operational range for accurate sensing, but dynamically limits the range when shock occurs, preventing breakage while maintaining measurement precision during normal operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The stopper member effectively suppresses excessive oscillation within a predetermined range, preventing damage and ensuring the angular velocity sensing element maintains its functionality even under large shocks, while simplifying fabrication and reducing the height of the sensing element.
Implementation Method 1
a piezoelectric element formed on the oscillation arm
Data Source
AI summary
An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing element 2 according to the present embodiment includes oscillation arms 22, 23 and 24 formed of a semiconductor material, and a stopper member provided to limit the oscillation range of the oscillation arms. As such a stopper member, a first stopper member 25 is provided, for example, which limits the oscillation range of the oscillation arms at least within a single plane of the arms. Fixing portions 21, the oscillation arms 22, 23 and 24 and the first stopper member 25 are integrally formed by processing a semiconductor material, such as silicon.