Angular Velocity Sensor Spring Turned-Back Part Positioning
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Solution Overview
Problem
Existing angular velocity sensors face challenges in size reduction while maintaining detection sensitivity, as reducing the displacement width of movable electrodes decreases detection sensitivity.
Innovation Solution
The design incorporates a substrate with a spring section and detection electrodes, where the turned-back part of the spring section is positioned closer to the center than the end of the detection electrode, allowing for reduced size without compromising sensitivity by optimizing the displacement and positioning of the spring section relative to the detection electrodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the displacement width of the movable electrode is reduced to decrease sensor size, then the sensor size is reduced, but the detection sensitivity decreases
Solution Approach 1:
The patent transitions from one-dimensional displacement measurement to two-dimensional capacitance measurement by introducing multiple electrode fingers arranged in both first and second directions. The detection electrode includes first electrode fingers extending in the first direction and second electrode fingers extending in the second direction, enabling sensitivity enhancement through multi-dimensional electrode arrangement rather than relying solely on displacement width.
Solution Approach 2:
The detection electrode is segmented into multiple first electrode fingers and second electrode fingers, with the spring section divided into multiple segments between these electrode fingers. This segmentation increases the number of capacitance measurement points while reducing the displacement width required for each individual electrode, thereby maintaining detection sensitivity in a compact form.
2Volume of moving object
If the spring section is disposed close to the detection electrode to reduce size, then the sensor size is reduced, but the displacement of the spring section decreases
Solution Approach 1:
The patent resolves the spatial conflict by utilizing two-dimensional electrode finger arrangements. The first electrode fingers extend in the first direction while second electrode fingers extend in the second direction, allowing the spring section to be positioned close to the detection electrode center without compromising displacement width, as the effective measurement area is distributed across multiple directions.
Solution Approach 2:
Different regions of the detection electrode have different functional qualities: the first electrode fingers are positioned to maximize displacement measurement in the first direction, while the second electrode fingers are positioned to maximize measurement in the second direction. The spring section is strategically disposed between these electrode fingers with its turned-back part positioned to optimize both proximity and displacement capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables a smaller angular velocity sensor without deteriorating detection sensitivity, allowing for more compact designs in applications such as inertial measurement devices, vehicle positioning systems, and portable electronic apparatuses.
Implementation Method 1
a spring section (46B) which can elastically be deformed in the first direction
Implementation Method 2
an angular velocity sensor of a capacitance type having an element provided with a movable electrode and a stationary electrode each having a comb-like shape and disposed so as to be opposed to each other to detect angular velocity based on the capacitance between these two electrodes
Data Source
AI summary
An angular velocity sensor includes a substrate, a detector including a movable detection electrode and a fixed detection electrode opposed to the movable detection electrode, and a driver adapted to drive the detector. The movable detection electrode is supported by a first spring that is elongated parallel to a Y axis from a first turned-back part, and a second spring that is elongated parallel to the Y axis from a second turned-back part. The first and second springs are fixed at first and second anchors. The first turned-back part is closer to the second spring than the first anchor. The detector includes a first surface opposed to the first spring, and a second surface disposed closer to the first spring than the first surface.