Angular Velocity Sensor Vibration Control
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Solution Overview
Problem
Existing angular velocity sensors face reduced detection accuracy due to machining errors and viscosity-induced components, which increase servo load and noise, especially when operated under atmospheric pressure.
Innovation Solution
The angular velocity sensor is designed with a specific configuration that includes a substrate, vibrator, beam, driving, detecting, and restricting parts, where the detuning degree and Q-value are optimized to reduce the viscosity-caused escaping component, allowing operation under atmospheric pressure with minimized servo load and noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the angular velocity sensor operates under atmospheric pressure, then ease of operation is improved, but the viscosity-caused escaping component increases leading to reduced measurement precision
Solution Approach 1:
The patent changes the resonance frequency parameter of the vibrator to reduce the viscosity-caused escaping component. By optimizing the resonance frequency, the sensor achieves reduced noise and servo load while operating under atmospheric pressure, thus maintaining both ease of operation and measurement precision
2Measurement precision
If the vibrator is designed to reduce viscosity-caused escaping component, then measurement precision is improved, but device complexity increases due to optimized resonance frequency design
Solution Approach 1:
The patent applies parameter changes by optimizing the resonance frequency of the vibrator. This involves adjusting physical dimensions and material properties of the vibrator to achieve the desired frequency, which reduces the viscosity-caused escaping component and improves detection accuracy without requiring complex additional structures
3Measurement precision
If machining error is reduced, then measurement precision is improved, but manufacturing precision requirements increase leading to increased device complexity
Solution Approach 1:
The patent changes the resonance frequency parameter to make the system less sensitive to machining errors. By operating at an optimized resonance frequency, the vibrator reduces the impact of manufacturing tolerances on the viscosity-caused escaping component, thereby maintaining measurement precision without requiring extremely tight manufacturing controls
4Measurement precision
If the servo load is reduced, then measurement precision is improved, but the restricting part design becomes more complex
Solution Approach 1:
The patent reduces servo load by optimizing the resonance frequency of the vibrator. This parameter change decreases the viscosity-caused escaping component, which in turn reduces the corrective force needed from the restricting part, thereby improving measurement precision while keeping the restricting part design relatively simple
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the viscosity-caused escaping component to less than 1%, enhancing detection accuracy and minimizing servo load, even under atmospheric pressure conditions.
Implementation Method 1
a driving part having a driving electrode opposed to the vibrator, and configured to vibrate the vibrator in the first direction
Implementation Method 2
a detecting part having a detecting electrode opposed to the vibrator, and configured to detect displacement of the vibrator in the second direction as a change in capacitance
Implementation Method 3
a restricting part having a restricting electrode opposed to the vibrator, and configured to restrict displacement of the vibrator in the second direction
Implementation Method 4
displacement of the vibrator in the second direction being caused by Coriolis force generated in the vibrator due to vibration of the vibrator and an angular velocity
Data Source
AI summary
In an angular velocity sensor, a vibrator is coupled with a substrate through a beam part, and is movable in a first direction and a second direction that is perpendicular to the first direction. A driving part is configured to vibrate the vibrator in the first direction. A detecting part is configured to detect displacement of the vibrator in the second direction as a change in capacitance, the displacement being caused by Coriolis force generated in the vibrator due to vibration of the vibrator and an angular velocity around a third direction that is perpendicular to the first direction and the second direction. A restricting part is configured to restrict displacement of the vibrator in the second direction based on the change in capacitance. The angular velocity sensor is configured to satisfy a condition where β sin θ is equal to or less than 1.