Angular Velocity Sensor Vibration Isolation via Clamped-Clamped Beam
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Solution Overview
Problem
Existing angular velocity sensor elements face challenges in miniaturization and thickness reduction due to limited machining accuracy, and they are prone to noise from external vibrations being transmitted to the detection arms.
Innovation Solution
The design incorporates a clamped-clamped beam shaped second coupling arm that acts as a shock absorber, reducing external vibrations by filtering out frequencies that would otherwise be transmitted to the element section, and a three-point support structure for enhanced stability and vibration reduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If fine processing is performed on a single crystal thin plate to form a vibrating arm, then miniaturization and thickness reduction are achieved, but the sensor becomes sensitive to external vibrations transmitted from the fixed section
Solution Approach 1:
The patent introduces a vibration absorber as an intermediary component between the fixed section and the element section. This vibration absorber acts as a mediator that selectively absorbs external vibration frequencies while allowing the sensor to function normally, thereby preventing vibration noise from reaching the detection arms without compromising the miniaturization achievement
2Ease of manufacture
If the sensor structure is simplified for miniaturization, then manufacturing becomes easier, but vibration isolation performance deteriorates
Solution Approach 1:
The vibration absorber is implemented as a thin-film structure that can be integrated into the miniaturized sensor design. This flexible thin-film approach allows vibration isolation functionality to be incorporated without significantly increasing structural complexity or manufacturing difficulty, maintaining ease of manufacture while improving vibration isolation performance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively absorbs and filters external vibrations, preventing them from being detected as noise and allowing for miniaturization and thickness reduction while maintaining stability and accuracy in angular velocity detection.
Implementation Method 1
the clamped-clamped beam shaped second coupling arm 7a to 7c functions as a shock absorber, so a vibration caused by this shock is reduced or filtered
Data Source
AI summary
There is provided an angular velocity sensor element which, even when a sudden vibration is given from the outside, can absorb the vibration to prevent the vibration from being transmitted to an element section thereof. An angular velocity sensor element 1 according to the present embodiment includes: sensor units 10a to 10c with driven-related and detection-related vibrating arms; a base section 4 which couples the sensor units 10a to 10c; a first fixed section 6 which is frame-shaped and which surrounds the base section 4 and the sensor units 10a to 10c; first coupling arms 5a to 5c which couple the base section 4 to the first fixed section 6; a second fixed section 8 which is disposed in at least a part of the area around the first fixed section 6; and second coupling arms 7a to 7c which couple the first fixed section 6 to the second fixed section 8.