Anisotropic Thermal Layer for Zone Temperature Control

Solution Overview

Problem

Existing zone temperature control structures face issues with heat efficiency and temperature uniformity due to heat transfer at boundaries between different temperature zones, leading to the formation of hot spots when using heat insulators, which hinder temperature uniformity and decrease heat efficiency.

Innovation Solution

A zone temperature control structure with a heat-conducting anisotropic material layer is introduced, where the material has lower conductivity in the direction of zone arrayment and higher conductivity in the perpendicular direction, acting as a heat insulator in one direction and heat conductor in the other, preventing hot spot formation and maintaining temperature differences.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a heat insulator is disposed between adjacent zones, then heat transfer between zones is reduced and temperature difference is maintained, but hot spots form and heat efficiency decreases

Engineering Contradiction:

Improvetemperature difference between zonesVSAvoidheat efficiency

Core Design Contradiction:

TemperatureVSLoss of energy

Solution Approach 1:

The patent changes the thermal conductivity parameter of the boundary material by introducing anisotropy. The heat-conducting anisotropic material layer has different thermal conductivity values in different directions: low thermal conductivity in the radial direction (between zones) to maintain temperature difference, and high thermal conductivity in the axial direction (parallel to heat input) to prevent hot spot formation and improve heat efficiency.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite material structure consisting of a heat-conducting anisotropic material layer placed between adjacent temperature zones. This layer is made of materials such as carbon fiber-reinforced plastics or metal matrix composites with aligned reinforcement, creating a composite structure that exhibits direction-dependent thermal conductivity properties to simultaneously address both contradictions.

Inventive Principle:

Principle #40Composite materials

2Temperature

If a heat insulator is disposed between zones, then temperature uniformity in each zone is improved, but hot spots form and hinder temperature uniformity

Engineering Contradiction:

Improvetemperature uniformity in zoneVSAvoidhot spot formation

Core Design Contradiction:

TemperatureVSObject-affected harmful factors

Solution Approach 1:

The patent changes the thermal conductivity parameter of the boundary material by introducing anisotropy. The heat-conducting anisotropic material layer has different thermal conductivity values in different directions: low thermal conductivity in the radial direction (between zones) to maintain temperature difference, and high thermal conductivity in the axial direction (parallel to heat input) to prevent hot spot formation and improve heat efficiency.

Inventive Principle:

Principle #35Parameter changes

3Loss of energy

If heat insulator is used between zones, then heat conduction in zone arrayment direction is suppressed, but heat conduction in perpendicular direction is hindered causing hot spots

Engineering Contradiction:

Improveheat conduction suppression between zonesVSAvoidheat conduction in perpendicular direction

Core Design Contradiction:

Loss of energyVSTemperature

Solution Approach 1:

The patent changes the thermal conductivity parameter of the boundary material by introducing anisotropy. The heat-conducting anisotropic material layer has different thermal conductivity values in different directions: low thermal conductivity in the radial direction (between zones) to maintain temperature difference, and high thermal conductivity in the axial direction (parallel to heat input) to prevent hot spot formation and improve heat efficiency.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively suppresses heat conduction in the direction of zone arrayment, maintains temperature differences, and ensures smooth heat transfer in the perpendicular direction, preventing hot spots and enhancing heat efficiency.

Implementation Method 1

a heat-conducting anisotropic material layer disposed between the at least two zones, the heat-conducting anisotropic material layer is configured such that heat conductivity is lower in a direction in which the at least two zones are arrayed than in a direction intersecting the direction in which the at least two zones are arrayed

Methodology Applied

Scientific EffectThermal anisotropy: Anisotropy

Data Source

PatentUS9484232B2Zone temperature control structure

Publication Date: 2016.11.01 TOKYO ELECTRON LTD

AI summary

A zone temperature control structure which has two or more zone of which surface temperatures are controlled to different temperatures, respectively. The structure can maintain a temperature difference by suppressing heat conduction in a direction in which the zones are arrayed, and prevent formation of a hot spot by ensuring smooth heat conduction for heat input in a direction intersecting the direction in which the zones are arrayed. A heat-conducting anisotropic material layer is disposed between the two or more zones. The heat-conducting anisotropic material layer is configured such that heat conductivity is lower in the direction in which the two or more zones are arrayed than in the direction intersecting the direction in which the two or more zones are arrayed.