Annealed Resin Components in Substrate Storing Containers
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Solution Overview
Problem
The influence of outgas from the substrate storing container on semiconductor wafers needs to be reduced to prevent damage during storage and transportation.
Innovation Solution
A substrate storing container with an external component made from resin, such as polybutylene terephthalate, polyacetal, or polypropylene, is designed with a specific shape and size to minimize dimensional deformation and is annealed to reduce outgas emission, thereby reducing the impact on stored substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If external components are used for positioning and support, then ease of manufacture is improved, but outgas emission increases causing harm to substrates
Solution Approach 1:
The patent applies parameter changes by implementing an annealing process for the external components made of resin. This thermal treatment modifies the physical and chemical parameters of the resin material, specifically reducing its outgas emission characteristics while maintaining its structural and positioning functions. The annealing process transforms the resin's molecular structure to minimize volatile organic compound release that could harm semiconductor substrates.
Solution Approach 2:
The patent employs preliminary action by performing the annealing process on external components before they are assembled into the substrate storing container. This pre-treatment ensures that outgas emission is reduced in advance, preventing potential contamination of substrates during storage and transportation. The components are prepared and treated with optimized thermal conditions prior to final assembly.
2Manufacturing precision
If high dimensional precision is required for front retainer, then substrate support precision is improved, but manufacturing complexity increases
Solution Approach 1:
The patent applies local quality by differentiating the precision requirements between internal and external components. The front retainer (internal component) requires high dimensional precision for direct substrate support, while external components like positioning members have relaxed precision requirements. This localized quality assignment optimizes manufacturing complexity by focusing high precision only where absolutely necessary for substrate integrity.
Solution Approach 2:
The patent introduces the annealing process as an intermediary treatment that bridges the gap between manufacturing ease and substrate protection. By treating external components with annealing, the patent achieves substrate protection without requiring these components to have high dimensional precision, thus simplifying their manufacturing while still preventing outgas-related damage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The annealed external component significantly decreases outgas emission, enhancing dimensional precision and reducing the influence of outgas on substrates, even during transportation in sealed bags.
Implementation Method 1
an external component made from resin which is mounted to at least one of a part of the container main body other than the main body inner face, and a part of the lid body main body other than the lid body inner face, in which the external component is annealed
Data Source
AI summary
The lid body which includes a lid body main body having a lid body inner face and a lid body outer face, is detachable to the opening rim portion, and can close the container main body opening portion, wherein the lid body inner face forms the substrate storing space together with the main body inner face when the container main body opening portion is closed. The external component made from resin that is mounted to at least one of a part of the container main body other than the main body inner face, and a part of the lid body main body other than the lid body inner face. The external component is annealed.