Annular Blade Groove and Oxidizing Fluid for Burr-Free Wafer Dicing
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Solution Overview
Problem
The existing method of processing plate-shaped workpieces with layered metal bodies using a cutting blade tends to produce burrs due to metal elongation, especially when the processing rate is increased, which can lower the quality of the processed workpiece.
Innovation Solution
A method involving the use of an annular cutting blade with a groove on its outer peripheral portion, where a cutting fluid containing an organic acid and an oxidizing agent is supplied to the workpiece, effectively lowering the ductility of the metal and preventing burr formation, allowing for increased processing rates without compromising quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the processing rate is increased to improve productivity, then the processing speed increases, but the quality of processing deteriorates due to burr formation from metal elongation and heat generation
Solution Approach 1:
The patent applies parameter changes by modifying the chemical state of the metal through cutting fluid containing oxidizing agents and organic acids. This chemical modification changes the metal's ductility parameters, allowing high-speed cutting without burr formation. The cutting fluid chemically alters the metal properties at the cutting zone, enabling both high processing rates and high quality simultaneously.
Solution Approach 2:
The cutting fluid acts as an intermediary substance between the cutting blade and the metal workpiece. It mediates the cutting process by chemically modifying the metal's ductility through oxidizing agents and organic acids, allowing the blade to cut at high speeds without causing metal elongation and burr formation. The intermediary chemically facilitates the cutting action.
2Ease of manufacture
If a conventional cutting blade is used to cut metal layered bodies, then the processing can be performed, but burrs are formed due to metal elongation contact with the blade
Solution Approach 1:
The cutting fluid serves as an intermediary that chemically modifies the metal's ductility during cutting. By introducing oxidizing agents and organic acids into the cutting zone, the metal becomes less ductile and more brittle, preventing elongation and burr formation while maintaining ease of cutting.
Solution Approach 2:
The patent changes the chemical parameters of the metal through the cutting fluid's oxidizing agents and organic acids. This parameter change in metal ductility allows the cutting process to proceed without burr formation, resolving the contradiction between ease of manufacture and manufacturing precision.
3Productivity
If the cutting blade processes the wafer at an increased rate, then productivity improves, but more heat is generated that produces larger burrs
Solution Approach 1:
The cutting fluid changes the thermal and chemical parameters at the cutting zone. The oxidizing agents and organic acids modify the metal's response to heat, preventing thermal softening and subsequent burr formation even at high processing rates. This parameter change allows high productivity without the harmful effects of heat-generated burrs.
Solution Approach 2:
The cutting fluid acts as a thermal and chemical intermediary between the cutting blade and workpiece. It absorbs and dissipates heat while simultaneously chemically modifying the metal to prevent burr formation, enabling high-speed processing without the harmful thermal effects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enables efficient processing of workpieces at higher rates while maintaining quality by modifying the metal's ductility with the cutting fluid, preventing burr formation and ensuring consistent results.
Implementation Method 1
The cutting fluid which contains an organic acid and an oxidizing agent is supplied to the cutting blade and the workpiece in severing the layered bodies containing metal with the cutting blade. The organic acid and the oxidizing agent are effective to modify the metal contained in the layered bodies, thereby lowering the ductility of the metal while the cutting blade is severing the layered bodies.
Data Source
AI summary
A method of processing a plate-shaped workpiece that includes layered bodies containing metal which are formed in superposed relation to projected dicing lines, includes the steps of holding the workpiece on a holding table, and thereafter, cutting the workpiece along the projected dicing lines with an annular cutting blade, thereby separating the layered bodies. The cutting blade has a groove defined in a face side or a reverse side of an outer peripheral portion thereof that cuts into the workpiece in the step of cutting the workpiece. The step of cutting the workpiece includes the step of cutting the workpiece while supplying a cutting fluid containing an organic acid and an oxidizing agent to the workpiece.