Annular Cooling Fluid Passage for Magnet Cores
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Solution Overview
Problem
Current magnet designs for substrate processing in semiconductor manufacturing face inefficiencies in cooling, as the removal of material to form a cooling passage reduces the magnetic field strength and effectiveness, necessitating an improved cooling arrangement.
Innovation Solution
The implementation of an annular coolant fluid passage between a metal core and an annular core element, with a first diameter and a middle section of a second diameter, allows for effective heat dissipation while maintaining the magnetic field strength by positioning the coolant fluid close to the heat source and minimizing material removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a cooling passage is formed at the centerline of the core, then cooling effectiveness is improved, but the amount of material in the metal core is reduced which undesirably reduces the strength and effectiveness of the magnetic field
Solution Approach 1:
The cooling passage is moved from a central longitudinal position to an annular configuration that extends radially outward from the centerline to the outer periphery of the core. This dimensional change allows the cooling fluid to access heat sources at multiple radial distances simultaneously, improving cooling effectiveness without requiring removal of material from the central core region where the magnetic field is generated.
2Loss of energy
If a cooling passage of requisite size is formed, then heat removal capacity is improved, but a relatively large amount of material must be removed which reduces the amount of material in the metal core
Solution Approach 1:
The cooling passage is segmented into multiple radial sections that extend from the centerline to the outer periphery. This segmentation allows the cooling fluid to flow through multiple pathways simultaneously, increasing the total heat removal capacity without requiring a single large central passage that would remove excessive core material.
3Power
If current is increased to create stronger magnetic fields, then magnetic field effectiveness is improved, but heat generation increases which requires more cooling
Solution Approach 1:
The annular cooling passage acts as an intermediary heat transfer pathway that efficiently removes heat generated by high current operation. The passage configuration allows cooling fluid to flow close to the heat sources at multiple radial distances, providing effective heat removal that enables sustained high current operation without excessive temperature rise.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances cooling capacity, allowing for increased current flow without compromising magnetic field performance, thereby improving the operational reliability and efficiency of magnets in substrate processing.
Implementation Method 1
an annular coolant fluid passage is formed between the cavity and the annular core element
Implementation Method 2
heat generated in the windings is be conducted through the thickness of the core
Data Source
AI summary
A magnet having an annular coolant fluid passage is generally described. Various examples provide a magnet including a first magnet and a second magnet disposed around an ion beam coupler with an aperture there through. The first and second magnets each including a metal core having a cavity therein, one or more conductive wire wraps disposed around the metal core, and an annular core element configured to be inserted into the cavity, wherein an annular coolant fluid passage is formed between the cavity and the annular core element. Furthermore, the annular core element may have a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter. Other embodiments are disclosed and claimed.