Annular Detection Structure for Semiconductor Opening Location
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Solution Overview
Problem
Existing semiconductor manufacturing processes face challenges in accurately detecting and locating openings in semiconductor dies, which affects manufacturing yield and quality.
Innovation Solution
A method and semiconductor device that utilize a detection structure formed in an annular shape within the semiconductor die, generating a clock signal by contacting a probe to the detection structure through a switch, and measuring the period of the clock signal to determine the location of the opening.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional inspection methods are used to detect openings in semiconductor dies, then the inspection process is simple, but the detection precision and location accuracy are insufficient
Solution Approach 1:
The detection structure is divided into multiple conduction segments arranged in an annular shape around the peripheral circuit region. Each segment can be independently contacted by the probe, allowing segmented measurement of the clock signal period to determine opening location with high precision without requiring a complex monolithic detector
Solution Approach 2:
A clock signal is introduced as an intermediary to transfer information about the opening location. The probe contacts the detection structure to generate or modify the clock signal, and the period of this signal serves as a mediator that encodes the position of the opening, enabling precise detection without direct mechanical measurement
2Manufacturing precision
If the detection structure is made more complex to improve opening location accuracy, then the detection precision improves, but the device complexity increases
Solution Approach 1:
The detection structure uses an annular (curved) arrangement of conduction segments around the peripheral circuit region instead of linear segments. This curved geometry provides better spatial distribution for detecting openings at different locations with uniform precision, improving location accuracy while maintaining reasonable structural complexity
Solution Approach 2:
The clock signal operates periodically, and the detection method counts the number of periods or measures the period duration to determine opening location. This periodic measurement approach converts spatial position information into temporal information, achieving high precision detection without requiring overly complex structural arrangements
3Productivity
If conventional detection methods are used, then the device complexity is low, but the productivity and manufacturing yield are reduced due to inability to accurately detect openings
Solution Approach 1:
The detection structure utilizes existing conduction paths and circuit elements within the semiconductor device itself rather than requiring entirely separate external testing equipment. The clock signal can be generated from existing circuitry, and the detection process leverages the device's own structure, reducing additional complexity while improving detection capability and manufacturing yield
Solution Approach 2:
The detection method replaces potential mechanical or visual inspection methods with electrical measurement of the clock signal period. This substitution provides more precise and automated detection of opening locations, improving manufacturing yield through better defect detection without significantly increasing overall device complexity
Data Source
AI summary
A method of detecting an opening of a semiconductor device includes generating a clock signal based on a probe of a measuring circuit contacting, via a switch, an end of a detection structure, measuring a period of the clock signal, counting a number of periods of the clock signal during a reference time interval, and determining, based on the number of periods of the clock signal, a location of the opening of the semiconductor device. The detection structure being formed in a semiconductor die of the semiconductor device in an annular shape.