Annular Frame Cleaning for Grinding Swarf Removal
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Solution Overview
Problem
The existing grinding processes for small-type substrates, such as sapphire and SiC substrates, face issues with grinding swarf deposition on annular frames, leading to defective conveyance, contamination, and the need for manual swarf removal, which increases operational steps and risks.
Innovation Solution
A grinding apparatus with a chuck table that uses a protective tape to hold the workpiece and incorporates a frame cleaning unit with flexible cleaning members or gas/liquid jets to automatically clean the annular frame, eliminating the need for manual swarf removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If manual wiping is used to remove grinding swarf from the annular frame, then cleaning effectiveness is improved, but the number of operational steps increases and productivity decreases
Solution Approach 1:
The annular frame is designed with a tilted cleaning surface that automatically guides grinding swarf toward a collection groove due to gravity, eliminating the need for manual wiping operations. The frame serves its own cleaning function through its geometric design
Solution Approach 2:
The cleaning function is separated from the main frame structure by extracting swarf removal to a dedicated groove system that collects and channels debris away from the frame surface, allowing automatic removal without additional manual steps
2Ease of operation
If grinding is performed on small-type substrates using an annular frame, then substrate handling is improved, but grinding swarf deposits on the frame causing defective conveyance and peeling
Solution Approach 1:
The frame surface is tilted at a specific angle relative to the horizontal plane, creating a gravitational gradient that directs swarf particles along the inclined surface toward collection grooves, preventing accumulation on horizontal surfaces that would cause defects
Solution Approach 2:
The tilted surface geometry is pre-designed into the frame structure before grinding operations begin, so that swarf naturally accumulates in predetermined groove locations during the grinding process, enabling automatic collection without post-processing intervention
3Object-affected harmful factors
If the annular frame is cleaned manually, then contamination is reduced, but the complexity of the operational process increases
Solution Approach 1:
The frame's tilted surface and integrated grooves create a self-cleaning mechanism where gravity automatically removes swarf during normal handling operations, eliminating the need for separate manual cleaning steps and reducing operational complexity
Solution Approach 2:
The cleaning function is merged with the frame's structural design itself, where the tilted surface and grooves that form part of the frame geometry simultaneously perform the cleaning function, rather than requiring separate cleaning equipment or procedures
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively automates the cleaning of the annular frame, reducing manual intervention and preventing contamination, thereby improving process efficiency and maintaining a clean environment.
Implementation Method 1
a chuck table that holds under suction a workpiece through a protective tape
Implementation Method 2
a grinding unit that has a grindstone for grinding the workpiece held by the chuck table
Implementation Method 3
a first cleaning member that makes contact with the other surface of the annular frame and has flexibility
Implementation Method 4
a second cleaning member that jets at least either gas or liquid from above the other surface of the annular frame
Data Source
AI summary
A grinding apparatus includes a chuck table that holds a workpiece through a protective tape, where the protective tape is attached to one surface of an annular frame so as to cover an opening of the annular frame and the workpiece is attached to the protective tape on an inner side of an inner circumferential edge of the opening of the annular frame; a grinding unit for grinding the workpiece; and a frame cleaning unit that cleans the other surface located on a side opposite to the one surface of the annular frame obtained after grinding of the workpiece, and wherein the frame cleaning unit has either: (i) a first cleaning member configured and arranged for making contact with the other surface of the annular frame and having flexibility, or (ii) a second cleaning member that jets at least either gas or liquid from above the other surface of the annular frame.