Annular Movable Portion Sensor Resonance Control

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Solution Overview

Problem

Existing sensors, such as gyro sensors, face challenges in improving their characteristics, particularly in maintaining resonance frequencies and suppressing the influence of low-order resonances.

Innovation Solution

The sensor design includes a base body, a first fixed portion, a movable portion with specific annular regions, a connecting portion, and fixed electrodes. The movable portion is structured with distinct partial regions and a connecting portion that maintains a specific mass and area ratio, ensuring stable resonance frequencies and suppressing low-order resonance influence.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the movable portion is designed with conventional structures, then the device complexity is low, but the resonance frequency stability and low-order resonance suppression are insufficient

Engineering Contradiction:

Improveresonance frequency stabilityVSAvoidmovable portion structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The movable portion is divided into multiple annular regions (first, second, third partial regions) with different functions. The first region provides mass, the second region connects to the fixed portion, and the third region contains the detection electrode. This segmentation allows each region to be optimized for its specific function, achieving stable resonance frequency while suppressing low-order resonances.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the movable portion are given different properties: the first partial region has optimized mass characteristics, the second partial region provides mechanical connection, and the third partial region contains the electrode for detection. This local differentiation of properties enables the overall structure to achieve both simplicity and high reliability.

Inventive Principle:

Principle #3Local quality

2Measurement precision

If the sensor structure is simplified, then the ease of manufacture is high, but the detection precision for forces and accelerations deteriorates

Engineering Contradiction:

Improvedetection accuracyVSAvoidstructure fabrication

Core Design Contradiction:

Measurement precisionVSEase of manufacture

Solution Approach 1:

The sensor combines multiple functions into a single integrated movable portion structure. The mass provision, mechanical connection, and electrostatic detection functions are merged into one component with three annular regions, reducing the number of separate parts while maintaining high detection precision for forces and accelerations.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The movable portion serves multiple functions simultaneously: it provides mass for resonance, connects mechanically to the fixed portion, and contains the detection electrode. This multi-functionality reduces the overall device complexity and ease of manufacture while maintaining measurement precision.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for improved sensor characteristics by maintaining target resonance frequencies and effectively suppressing the influence of low-order resonances, thereby enhancing detection accuracy for forces and accelerations.

Implementation Method 1

a first movable portion electrode 13E... a first fixed electrode 41... The first electrode faces the first movable portion electrode

Methodology Applied

Scientific EffectCapacitance: Capacitance

Implementation Method 2

maintaining target resonance frequencies and effectively suppressing the influence of low-order resonances

Methodology Applied

Scientific EffectResonance: Resonance

Data Source

PatentUS12305987B2Sensor

Publication Date: 2025.05.20 KK TOSHIBA

AI summary

According to one embodiment, a sensor includes a base body, a first fixed portion, a movable portion, a connecting portion, and a first fixed electrode. The first fixed portion is fixed to the base body. The movable portion is provided around the first fixed portion and includes first to third partial regions. The first partial region is annular. The second partial region is annular. The second partial region is provided between the first partial region and the first fixed portion. The third partial region is annular. The third partial region is provided between the first and second partial regions and centered on the first fixed portion. The third partial region includes a first movable portion electrode. The connecting portion is provided between the first fixed portion and the second partial region. The first fixed electrode is fixed to the based body and faces the first movable portion electrode.