Annular Shadow Mask for Non-Planar Film Deposition
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Solution Overview
Problem
Existing shadow masks, whether rigid metal or sheet-shaped, face challenges in handling due to weight and size constraints, limiting their application to planar film formation and preventing size reduction, which hinders efficient film deposition on non-planar substrates.
Innovation Solution
An annular shadow mask with openings corresponding to the film formation regions is used, connected at its ends, rotating synchronously with the conveying device to match the film forming object's speed, allowing for lightweight and cost-effective film formation with a film forming source integrated within the mask.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a rigid metal shadow mask is used, then the mask structure is stable and durable, but the mask becomes heavy and difficult to handle
Solution Approach 1:
The patent replaces rigid metal masks with flexible thin film masks that can be deformed to match substrate contours. The thin film mask maintains sufficient structural stability for the application while dramatically reducing weight, resolving the contradiction between structural strength and weight.
2Adaptability or versatility
If a roll-shaped mask is used, then the mask can conform to curved substrates, but the film forming object must be deformed to match the mask shape
Solution Approach 1:
The patent inverts the traditional approach by making the mask flexible and adaptable to the substrate shape, rather than forcing the substrate to conform to a rigid mask shape. This allows the mask to be deformed to match various substrate contours without requiring substrate deformation.
3Weight of moving object
If a sheet-shaped mask substrate is used, then the mask can be lightweight, but the mask area must equal the substrate area preventing size reduction
Solution Approach 1:
The patent segments the mask into multiple flexible sections or zones that can be independently configured. This segmentation allows the mask to cover only the necessary film formation regions rather than requiring full substrate area coverage, enabling size reduction while maintaining lightweight characteristics.
4Device complexity
If a planar shadow mask is used, then the mask structure is simple, but the mask cannot be used for non-planar film forming objects
Solution Approach 1:
The patent transitions from a static planar mask to a dynamic flexible mask that can adapt its shape. The flexible mask maintains relative structural simplicity while gaining the ability to conform to non-planar substrates through controlled deformation, resolving the contradiction between simplicity and adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient and cost-effective film formation on non-planar substrates by reducing material usage and allowing for flexible mask design, overcoming the limitations of traditional shadow masks in handling and size constraints.
Implementation Method 1
When forming an organic layer of an organic EL element or an electrode of a liquid crystal display device by a vapor deposition or sputtering
Implementation Method 2
When forming an organic layer of an organic EL element or an electrode of a liquid crystal display device by a vapor deposition or sputtering
Data Source
AI summary
A shadow mask includes a mask foil and a plurality of openings provided on the mask foil in accordance with a shape of at least one region where films are formed on a film forming object. The mask foil has an annular shape where first end of the mask foil and a second end of the mask foil, which is opposed to the first end of the mask foil, are connected to each other.