Annular Wedge Coating Tool with Independent Mask Rotation
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Solution Overview
Problem
Existing planetary coating tools for annular or circular wedged coatings (AWCs) are limited in producing different types of AWC/CVF structures, requiring mechanical changes or separate tools for varying thickness profiles, making production costly and time-consuming.
Innovation Solution
A coating tool with a single mask per substrate, where the mask and substrate undergo relative rotation controlled by a separate motor, allowing for any desirable thickness profile around the circumference without mechanical changes, using a butterfly mask and independent motor control for planetary rotation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If fixed shape cams or fixed gears are used to impart rotations in planetary coating tools, then the mechanical setup is simple, but the rotation speeds are limited to fixed ratios and the tool can only produce one type of AWC/CVF
Solution Approach 1:
The patent replaces fixed mechanical transmission elements (cams and gears) with independently controlled motors that can dynamically adjust rotation speeds and ratios. This allows the system to adapt to different AWC/CVF production requirements without mechanical reconfiguration, resolving the contradiction between versatility and device complexity.
Solution Approach 2:
The invention changes the control parameters from fixed mechanical ratios to independently controllable motor speeds. By varying the rotation speed parameters of the planet carrier and masks through electronic control, the system can produce different thickness profiles and AWC types without physical modifications.
2Manufacturing precision
If mechanical changes are introduced or a different tool is used to produce a different type of AWC/CVF, then the desired thickness profile can be achieved, but the production becomes more expensive and time-consuming
Solution Approach 1:
The patent creates a universal coating tool capable of producing multiple AWC/CVF types with different thickness profiles using the same mechanical structure. The independently controlled motors allow a single tool to perform multiple functions, eliminating the need for reconfiguration and reducing production time and costs while maintaining precision.
Solution Approach 2:
The invention replaces the mechanical reconfiguration system with an electronic control system. Instead of physically changing cams or gears to alter thickness profiles, the system uses programmable motor control to achieve different deposition patterns, significantly reducing setup time and production costs.
3Device complexity
If a single motor with fixed gears is used to control rotations, then the device complexity is reduced, but the ability to control different rotation speeds and produce various AWC types is lost
Solution Approach 1:
The patent segments the rotation control into independent motor units, each controlling a specific component (planet carrier, masks). This segmentation allows each motor to operate independently at its own speed, providing flexibility in rotation control while keeping each motor unit relatively simple, thus balancing device complexity with adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the production of various AWC/CVF structures with desired thickness profiles using a single mask, reducing production costs and time, and maintaining high-quality thin film deposition without the need for tool reconfiguration.
Implementation Method 1
the aperture configured to allow material ejected from at least one deposition source to reach a predetermined section of the substrate and be deposited thereon
Data Source
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AI summary
An apparatus for depositing annular or circular wedge coatings with arbitrary dependence of thickness versus position includes a coating tool in which at least one substrate is disposed in a line of sight arrangement vs. least one deposition source, each substrate having an axis of symmetry and associated with a single mask having an aperture and positioned between the substrate and the least one deposition source, the mask and the substrate arranged to perform a relative rotation around a common axis to follow a law of motion which results in the deposition of a coating with a desired law of variation of thickness vs. position on the circumference of the substrate. The relative rotation is imparted by a motor. In embodiments in which there are a plurality of substrates and associated single masks, the substrates are positioned on a planet carrier independently rotatable by another motor.