Anode Holder Mask-Diaphragm Structure for Reduced Additive Loss
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Solution Overview
Problem
Conventional plating apparatuses experience excessive consumption of additives due to their contact with anodes, leading to decomposition and loss of effectiveness in forming desired films on substrates.
Innovation Solution
An anode holder with a mask and diaphragm configuration that minimizes the contact region between the diaphragm and the plating solution, using a mask with small holes to inhibit additive consumption by reducing contact with the anode.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a diaphragm is disposed to cover an opening in an anode holder to inhibit additive decomposition, then additive stability is improved, but the region where the diaphragm contacts plating solution becomes too wide, causing excessive additive consumption
Solution Approach 1:
The anode holder is divided into multiple regions: a through hole region allowing plating solution flow, and a blocked region where the diaphragm is disposed to inhibit additive decomposition. This segmentation allows the diaphragm to cover only the necessary area (opening of anode holder) rather than a wide region, thus reducing additive consumption while maintaining additive stability.
Solution Approach 2:
The diaphragm is selectively disposed only at the opening region of the anode holder where additive decomposition occurs, rather than covering the entire anode holder surface. This local application of the diaphragm provides the necessary protection against additive decomposition while minimizing the contact area between the diaphragm and plating solution, thereby reducing additive consumption.
2Loss of substance
If the diaphragm contact region with plating solution is reduced to minimize additive consumption, then additive stability is improved, but the effectiveness of suppressing additive decomposition may be compromised
Solution Approach 1:
The anode holder is segmented into a through hole region (for plating solution flow) and a blocked region (with diaphragm for additive protection). This segmentation ensures that the diaphragm is positioned precisely where needed to suppress additive decomposition without unnecessarily increasing contact area, thus balancing additive stability with minimized additive consumption.
Solution Approach 2:
The diaphragm acts as an intermediary component that selectively blocks the decomposition reaction between the additive and the anode while allowing plating solution flow through the through hole. By positioning the diaphragm only at the critical opening region, it effectively suppresses additive decomposition without requiring extensive contact area, thus maintaining additive stability while minimizing additive consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces additive consumption, maintaining the effectiveness of the plating process by minimizing decomposition and ensuring consistent film formation on substrates.
Implementation Method 1
a diaphragm including a fine hole with a size smaller than an average size of a molecule included in an additive
Implementation Method 2
an electroplating method... the substrate and the anode are energized, and accordingly a plating film is formed on the substrate surface
Implementation Method 3
oxygen is generated by reaction between the anode and the plating solution. The additive in the plating solution reacts with this oxygen and is decomposed
Data Source
AI summary
Provided are an anode holder capable of reducing consumption of an additive in a plating apparatus, and a plating apparatus. An anode holder for holding an anode for use in a plating apparatus is provided, and the anode holder includes an inner space formed in the anode holder, to house the anode, a mask including a plurality of holes, and configured to cover a front surface of the inner space, and a diaphragm, at least part of the diaphragm being fixed to the mask in a region of the mask that covers the front surface of the inner space.