Anodic Oxide Mask for OLED Uniform Deposition
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Solution Overview
Problem
Conventional masks made of invar for organic light emitting diodes face challenges in achieving high-resolution patterns due to difficulties in pattern formation and etching, resulting in non-uniform deposition regions and light emission issues where the edge portions appear dimmer than the central portions.
Innovation Solution
A mask formed with an anodic oxide film, featuring vertically penetrating transmission holes and pores with a magnetic material inside, allowing for precise pattern formation and contact with the substrate without additional magnetic support, ensuring uniform deposition and high-resolution patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If invar is used as the metal sheet for mask manufacture, then thermal expansion stability is improved, but pattern formation capability deteriorates
Solution Approach 1:
The invention uses a composite structure consisting of an invar substrate combined with an anodic oxide film layer. The invar substrate provides thermal expansion stability, while the anodic oxide film enables precise pattern formation through anodization. This composite approach allows both the thermal stability and pattern formation capability to coexist without compromising either property.
2Ease of manufacture
If conventional etching is used to form patterns in invar, then manufacturing process is simplified, but pattern precision deteriorates
Solution Approach 1:
The invention employs anodic oxidation to create a porous oxide film structure on the invar substrate. This porous anodic oxide film serves as a precise pattern template that can be formed with high precision through controlled anodization parameters. The porous structure allows for uniform material deposition and maintains precise pattern dimensions, overcoming the limitations of conventional etching methods.
3Ease of manufacture
If transmission holes are formed with non-uniform width, then manufacturing is easier, but deposition uniformity deteriorates
Solution Approach 1:
The invention controls the anodization parameters (voltage, time, electrolyte composition, temperature) to precisely control the formation of transmission holes with uniform width throughout the mask. By optimizing these parameters, the anodic oxide film forms holes with consistent dimensions that ensure uniform material deposition across the substrate, eliminating the non-uniformity problems associated with conventional hole formation methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the formation of high-resolution patterns with uniform deposition regions, eliminating the dimness issue at the edge portions and achieving consistent light emission across the organic light emitting diode.
Implementation Method 1
an anodic oxide film formed by anodizing metal
Implementation Method 2
anodic oxide film formed by anodizing metal
Implementation Method 3
the substrate is pressed against the mask by a magnetic force generated between the magnetic material and the magnetic plate
Data Source
AI summary
A mask for forming a pattern on a substrate is provided. The mask includes an anodic oxide film formed by anodizing metal, at least one transmission hole configured to vertically penetrate the anodic oxide film and formed in a corresponding relationship with the pattern, a plurality of pores formed in the anodic oxide film so as to have a smaller diameter than the transmission hole, and a magnetic material provided in each of the pores.