Anodic Aluminum Oxide Mold for High-Precision Probe Pins
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Solution Overview
Problem
Existing probe pins for semiconductor testing face challenges in ensuring overdrive amount, probe pressure, and high frequency characteristics, with limitations in dimensional accuracy and shape formation during laser cutting.
Innovation Solution
An anodic aluminum oxide mold is used to precisely manufacture probe pins with dimensions ranging from several tens of μm, incorporating an anodic aluminum oxide film with openings and metal fillers, supported by a mold structure with metal layers and support members, allowing for overdrive, probe pressure, and high frequency characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the length of the probe pin is shortened to equal to or less than 10 mm to reduce inductance and improve high frequency characteristics, then high frequency characteristics are improved, but the probe pin is plastically deformed during overdrive
Solution Approach 1:
The patent changes the material parameters of the probe pin by forming a composite structure with a copper base material and a nickel-cobalt alloy plating layer. This material parameter change allows the probe pin to maintain sufficient strength and elastic properties even when shortened to 10mm or less, preventing plastic deformation during overdrive while maintaining low inductance for high frequency characteristics.
2Stress or pressure
If the thickness of the probe pin is reduced to suppress stress during overdrive, then stress during overdrive is suppressed, but the cross-sectional area is reduced which lowers probe pressure and deteriorates permissible time-current characteristics
Solution Approach 1:
The patent employs composite materials by plating a nickel-cobalt alloy layer on the copper base material. This composite structure provides high strength and elastic modulus, allowing the probe pin to maintain adequate thickness for sufficient probe pressure and current carrying capacity while still suppressing stress during overdrive through the enhanced mechanical properties of the composite material.
3Productivity
If laser cutting technology is used to manufacture probe pins by cutting a metal sheet along a profile conforming to the final shape, then manufacturing efficiency is improved, but there is a limitation in improving the dimensional accuracy of the probe pin
Solution Approach 1:
The patent applies preliminary action by first forming the probe pin shape through electroplating in a mold, then subsequently removing the mold to obtain the final product. This preliminary formation of the precise shape through controlled plating, followed by mold removal, achieves high dimensional accuracy while maintaining manufacturing efficiency, overcoming the limitations of direct laser cutting.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the production of probe pins with improved overdrive, probe pressure, and high frequency characteristics, overcoming limitations of laser cutting by providing precise dimensional control and shape formation.
Implementation Method 1
anodic aluminum oxide mold made of anodic aluminum oxide film and provided with an opening
Data Source
AI summary
Proposed are an anodic aluminum oxide mold capable of manufacturing a molded article having at least a portion with a dimensional range of several tens of μm, and a mold structure including the same. Additionally, proposed are a method of manufacturing a molded article with a dimensional range of several tens of μm using the anodic aluminum oxide mold, and a molded article manufactured thereby.