Anodized Coating Heterogeneous Particles Crack Deflection
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Solution Overview
Problem
The coefficient of thermal expansion of aluminum alloys and Alumite coatings differ, leading to cracks in the coating during temperature rises, which can expose the base material, reducing corrosion resistance and increasing outgassing in semiconductor manufacturing apparatuses.
Innovation Solution
An aluminum member with an anodized coating containing heterogeneous particles with major-axis diameters between 0.1 μm and 15 μm, formed through an anodizing process using an acidic electrolytic solution, which guides cracks away from the thickness direction, preventing exposure of the base material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an Alumite coating is provided on an aluminum alloy to improve heat resistance and corrosion resistance, then the heat resistance and corrosion resistance are improved, but cracks form in the coating when temperature rises due to differential thermal expansion
Solution Approach 1:
The patent introduces heterogenous particles with specific properties (different from the base aluminum alloy) into the anodized coating to create localized regions that alter crack propagation behavior. These particles are distributed throughout the coating to provide localized reinforcement and crack deflection without compromising the overall coating integrity or thermal expansion characteristics.
Solution Approach 2:
The patent creates a composite structure by incorporating heterogenous particles into the anodized coating layer. This composite anodized coating combines the protective properties of the aluminum oxide coating with the crack-resistant properties of the heterogenous particle reinforcement, achieving both corrosion resistance and improved mechanical strength under thermal stress.
2Productivity
If the temperature of the aluminum member rises during semiconductor manufacturing processes, then the processing capability is improved, but cracks form in the Alumite coating exposing the base material
Solution Approach 1:
The patent incorporates heterogenous particles into the anodized coating during the anodizing process itself, before the coating is subjected to high-temperature processing conditions. This preliminary reinforcement structure is built into the coating matrix, so that when temperature rises during semiconductor manufacturing, the crack-resistant particle network is already in place to prevent coating failure.
3Strength
If cracks advance in the thickness direction of the Alumite coating to expose the aluminum alloy, then the coating integrity is compromised, but corrosion resistance decreases and outgassing increases
Solution Approach 1:
The heterogenous particles act as intermediary elements within the anodized coating that intercept and deflect crack propagation. These particles serve as a mediator between the thermal stress causing cracks and the base aluminum alloy, preventing direct exposure of the base material while maintaining the protective barrier function of the coating.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The heterogeneous particles in the anodized coating effectively divert cracks within the coating, maintaining coverage of the base material and enhancing heat resistance and corrosion resistance, even when cracks form.
Implementation Method 1
an anodizing-process step, in which the anodized coating, which contains the heterogenous particles, is formed on the base material by performing an anodizing process, using an acidic electrolytic solution, on the base material
Implementation Method 2
performing an anodizing process, using an acidic electrolytic solution, on the base material
Data Source
AI summary
An aluminum member for semiconductor manufacturing apparatuses (1) includes: a base material (2), which is composed of aluminum or aluminum alloy; and an anodized coating (3), which is formed on the base material (2). Heterogenous particles (31), which contain a metal atom or metal atoms other than Al atoms and the major-axis diameters of which are 0.1 μm or more and 15 μm or less, exist in the anodized coating (3). A method of manufacturing the aluminum member for semiconductor manufacturing apparatuses (1) includes an anodizing-process step, in which the anodized coating (3), which contains the heterogenous particles (31), is formed on the base material (2) by performing an anodizing process, using an acidic electrolytic solution, on the base material (2) having second-phase particles in the Al parent phase.