Antenna-Coupled RF Probe Tips for Easy Terahertz Replacement

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Solution Overview

Problem

Conventional RF probes for high-frequency semiconductor device characterization are prone to damage due to physical stress, require precise alignment for tip replacement, and are costly due to high precision micromachining, with limited scalability and dynamic range, especially at terahertz frequencies.

Innovation Solution

Antenna-coupled RF probes with replaceable tips, where the probe tip is decoupled from the probe body, allowing for separate fabrication and easy manual replacement, reducing alignment requirements and enabling frequency-independent probe bodies for scalable terahertz measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If the probe tip is mechanically clamped to the probe body, then the probe structure is stable, but the probe tip is susceptible to vibrations and flex under stress, limiting lifetime

Engineering Contradiction:
Improveprobe structure stabilityVSAvoidprobe tip reliability
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The probe is divided into separate components: a reusable probe body and replaceable probe tips. The probe body contains the mechanical clamping structure and waveguide interface, while the probe tips are separate elements that can be independently replaced when worn or damaged, eliminating the need to discard the entire probe assembly.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe tips are designed as disposable or replaceable components that can be easily manufactured and replaced. When probe tips wear out or get damaged, users can replace them without replacing the entire expensive probe body, significantly reducing operational costs.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

2Device complexity

If the probe tip is affixed to the probe body via mechanical clamping, then the probe assembly is simple, but the probe tips are prone to wear and tear due to normal use

Engineering Contradiction:
Improveprobe assembly complexityVSAvoidprobe tip durability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The probe system is segmented into a permanent probe body and replaceable probe tips. The mechanical clamping mechanism in the probe body provides simple attachment, while the separate probe tips can be replaced when worn, maintaining both simplicity and reliability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe tips are designed to be discarded when worn out and replaced with new ones. The reusable probe body is retained and recovered for continued use, separating the disposable component (tip) from the valuable component (body).

Inventive Principle:
Principle #34Discarding and recovering

3Measurement precision

If the probe requires physical contact with the chip under test, then the measurement is direct, but the sharp tips are subjected to physical stress, further limiting the lifetime of contact probes

Engineering Contradiction:
Improvemeasurement directnessVSAvoidprobe tip lifetime
Core Design Contradiction:
Measurement precisionVSDuration of action of moving object

Solution Approach 1:

The probe tips are designed as replaceable components that can withstand repeated contact cycles. When they wear out from physical contact with chips, they can be easily replaced without replacing the entire probe, maintaining measurement capability while extending the overall system lifetime.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The probe tip design allows for controlled contact force through the mechanical clamping structure, enabling the tips to withstand repeated contact cycles. The replaceable nature accommodates the wear from necessary physical contact while maintaining measurement directness.

Inventive Principle:
Principle #15Dynamics

4Reliability

If the contact force between the probe tip and test chip is kept under a threshold value, then the tip metallizations are protected, but the measurement capability is compromised

Engineering Contradiction:
Improvetip metallization integrityVSAvoidelectrical contact quality
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The mechanical clamping structure in the probe body provides controlled contact force that keeps tip metallizations intact while ensuring sufficient electrical contact for measurements. The replaceable probe tips are designed to work within this controlled force regime.

Inventive Principle:
Principle #15Dynamics

5Adaptability or versatility

If conventional contact probes are used for terahertz frequency measurements, then the measurement bandwidth is limited, whereas antenna-coupled probes enable wider frequency ranges

Engineering Contradiction:
Improvefrequency range adaptabilityVSAvoidprobe structure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The probe system separates the frequency-dependent antenna component from the reusable probe body. Different antenna designs optimized for specific frequency ranges can be implemented in replaceable probe tips, allowing the system to adapt to different frequency bands without replacing the entire probe.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe body is designed as a universal platform that can support different types of probe tips including both contact-based and antenna-coupled configurations. This enables a single probe body to serve multiple frequency ranges and measurement modes through tip replacement.

Inventive Principle:
Principle #6Universality (Multi-functionality)

6Device complexity

If the probe tip is integrated with the probe body, then the probe structure is compact, but replacing the tip requires precise alignment which is difficult to achieve

Engineering Contradiction:
Improveprobe structure compactnessVSAvoidtip replacement ease
Core Design Contradiction:
Device complexityVSEase of repair

Solution Approach 1:

The probe is segmented into a probe body and separate probe tips with simplified interfaces. The mechanical clamping structure provides alignment tolerances that allow easy replacement without requiring precise alignment, while maintaining a compact overall structure.

Inventive Principle:
Principle #1Segmentation

7Measurement precision

If high precision micromachining is used to fabricate probe tips, then the measurement precision is improved, but the manufacturing cost increases

Engineering Contradiction:
Improveprobe tip precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The probe system separates the high-precision requirements into only the probe tip portion, which is a small component. The majority of the probe body can be manufactured with standard tolerances and reused. This segmentation significantly reduces overall manufacturing costs while maintaining measurement precision through the precisely fabricated tips.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe tips are designed as replaceable components that can be manufactured more economically since they are small, simple elements. When worn, they are replaced rather than requiring expensive re-machining of the entire probe assembly.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the cost-effectiveness and operational lifespan of RF probes by allowing users to replace worn-out tips without precise alignment, supports a wide range of frequencies, and reduces insertion loss, enabling effective terahertz frequency measurements with reduced maintenance costs.

Implementation Method 1

test signals are coupled onto a probe tip wafer via an on-chip antenna

Methodology Applied
Scientific EffectAntenna radiation: Electromagnetic Induction

Data Source

PatentEP3542136B1Antenna-coupled radio frequency (RF) probe with a replaceable tip
Publication Date: 2023.10.25 OHIO STATE INNOVATION FOUND
  • EP3542136B1 patent drawingFigure 1
  • EP3542136B1 patent drawingFigure 2
  • EP3542136B1 patent drawingFigure 3

AI summary

Described herein are antenna-coupled radio frequency (RF) probes with replaceable tips. In the described embodiments, test signals are coupled onto a probe tip wafer via an on-tip antenna, thus the probe tip is decoupled from the probe body. This allows for separate fabrication of the probe body and the probe tip. As such, the probe tip can be made available as a "commodity" and the user can simply replace a worn-out or damaged probe tip, providing significant savings in per-unit cost and operation cost of the new contact probes. The decoupling of probe tip and probe body allows for manual replacement of probe tip without the need for extremely accurate alignment which is typically required in extremely high frequency probes. Manual replacement of the tips is only possible due to the much less stringent alignment requirements afforded by the antenna coupling from the probe body to the probe tip.