Anthraquinone Dye Photoresist for High-Resolution Image Sensors
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Solution Overview
Problem
Current image sensor technologies face challenges in achieving high-resolution images due to the limitations of pigmented color resists, which are heterogeneous and insoluble, leading to insufficient lithographic resolution and residue issues, while dye-based color resists lack thermal, light, and chemical stability.
Innovation Solution
Development of an anthraquinone dye-containing material, specifically a (meth)acrylate ester with an anthraquinone moiety and a linking group that enhances homogeneity and stability, used in a blue color photoresist for image sensors, allowing for smaller pixel sizes and improved manufacturing of high-resolution sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If pigmented color resists are used in color filter manufacturing, then color resistance is provided, but heterogeneity and insolubility lead to insufficient lithographic resolution and residue issues
Solution Approach 1:
The patent changes the fundamental parameter of color resist formulation from pigment-based to dye-based systems. This parameter change transforms the material from heterogeneous and insoluble to homogeneous and soluble, directly resolving the contradiction between manufacturing precision and compositional stability. The dye molecules dissolve uniformly in the resist matrix, eliminating particle heterogeneity while maintaining color resistance through molecular-level dispersion.
Solution Approach 2:
The invention creates a composite material system combining dye molecules with polymer resist matrices. This composite approach allows the dye to be molecularly dispersed throughout the polymer network, achieving both homogeneity (through dissolution) and color resistance (through the composite structure). The resulting material eliminates residue issues while maintaining sufficient lithographic resolution.
2Stability of the object's composition
If dye-based color resists are used instead of pigmented color resists, then enhanced homogeneity and reduced residue are achieved, but thermal stability, light stability, and chemical stability are insufficient
Solution Approach 1:
The patent applies local quality by introducing specific protective groups and molecular structures at strategic positions within the dye molecule. These localized modifications (such as bulky substituents or stabilizing functional groups) provide thermal and light stability without compromising the overall homogeneity of the dye-resist system. The stabilizing features are concentrated where needed rather than requiring complete molecular redesign.
Solution Approach 2:
The invention uses polymer matrices as intermediaries between the dye molecules and the external environment. The polymer network acts as a protective medium that stabilizes the dye against thermal degradation and light-induced fading while maintaining the dye's dissolved state. This intermediary structure allows the dye to benefit from both homogeneity and enhanced stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The anthraquinone dye-containing material provides enhanced thermal, light, and chemical stability, enabling the production of high-resolution image sensors with smaller pixel sizes and reduced residue, overcoming the limitations of existing technologies.
Implementation Method 1
an anthraquinone moiety having a transmittance spectrum producing blue light
Data Source
AI summary
A (meth)acrylate ester includes a (meth)acrylate moiety having an ester oxygen, an anthraquinone moiety having a transmittance spectrum producing blue light, and a linking group covalently bound to the ester oxygen and to a ring of the anthraquinone moiety, the linking group including, as a first component: phenyl, naphthyl, a linear alkyl group having from 1 to about 6 carbons, a branched alkyl group having from 3 to about 6 carbons, a cycloalkyl group having from about 3 to about 20 carbons, or a substituted aromatic group.