Anti-Fuse IC Layout With Parallel Via Paths for Lower Resistance

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Solution Overview

Problem

Integrated circuits (ICs) with anti-fuse bits face limitations in programming and read operations due to high path resistance, which can be attributed to the fewer electrical connections between active areas, leading to reduced current flow and performance.

Innovation Solution

Increasing the number of electrical connections between active areas to anti-fuse bits from four to enhance current paths, thereby reducing path resistance and improving both programming and read operations by configuring anti-fuse layouts with additional conductive regions and via regions to facilitate more parallel current paths.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the number of electrical connections between active areas to anti-fuse bits is increased, then path resistance decreases and current flow improves, but device complexity increases due to additional conductive regions and via regions

Engineering Contradiction:
Improveprogramming and read operations performanceVSAvoidlayout structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent divides the electrical connection path into multiple parallel segments by adding additional conductive regions and via regions. Instead of a single connection path, multiple segmented paths are created between active areas and anti-fuse bits, allowing current to flow through parallel routes which reduces overall path resistance while distributing the complexity across manageable layout segments.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent utilizes vertical dimension by adding multiple via regions that connect different metal layers. Instead of only horizontal routing in a single plane, the solution extends connections into the vertical dimension with vias penetrating through dielectric layers, creating three-dimensional connection paths that reduce resistance without significantly increasing lateral layout complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If additional conductive regions and via regions are added to create parallel current paths, then path resistance reduces and current flow increases, but manufacturing complexity increases

Engineering Contradiction:
Improvecurrent flow efficiencyVSAvoidlayout fabrication complexity
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The additional conductive regions and via regions serve multiple functions simultaneously: they provide parallel current paths for reduced resistance, act as routing channels for signal distribution, and offer redundant connection paths for defect tolerance. This multi-functionality justifies the increased manufacturing complexity by delivering multiple benefits from the same structural additions.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent modifies the electrical parameters of the connection paths by changing the number of parallel paths and the dimensions of conductive regions. By adjusting parameters such as via diameter, conductive region width, and path length, the solution optimizes current flow efficiency while managing manufacturing complexity through controlled parameter variations rather than fundamental design changes.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The increased number of electrical connections reduces path resistance, enhancing current flow and improving the performance of anti-fuse bit programming and read operations, leading to more efficient IC device manufacturing.

Implementation Method 1

a programming electric field is applied across the dielectric material layer to sustainably alter (e.g., break down) the dielectric material, thus decreasing the resistance of the dielectric material layer

Methodology Applied
Scientific EffectDielectric breakdown: Avalanche Breakdown

Data Source

PatentUS12089402B2Integrated circuit layout and method
Publication Date: 2024.09.10 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12089402B2 patent drawing
  • US12089402B2 patent drawing
  • US12089402B2 patent drawing

AI summary

A method of generating an IC layout diagram includes abutting first and second cells to define a first active region including first and second anti-fuse bits, abutting third and fourth cells to define a second active region including third and fourth anti-fuse bits, and defining a third active region including fifth and sixth anti-fuse bits adjacent to the first through fourth anti-fuse bits. The first cell includes first and second via regions overlapping first and second gate regions shared by respective structures and transistors of the first, third, and fifth anti-fuse bits, the fourth cell includes third and fourth via regions overlapping third and fourth gate regions shared by respective transistors and structures of the second, fourth, and sixth anti-fuse bits, the third cell includes fifth and sixth via regions overlapping the first gate region, and the second cell includes seventh and eighth via regions overlapping the fourth gate region.