Anti-Fuse Memory Cell Structure to Minimize Leakage Paths

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Solution Overview

Problem

Existing anti-fuse memory devices suffer from reliability issues due to leakage paths in programming transistors, which can cause undesired stress on unselected cells, leading to reduced overall reliability.

Innovation Solution

The implementation of an anti-fuse memory device with a non-transistor anti-fuse structure, where a first electrode and a second electrode sandwich an insulator, allowing for electrical coupling by breaking down the insulator, eliminating the need for a programming transistor and reducing leakage paths, and allowing for compact formation of memory cells using existing CMOS technologies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a programming transistor is used in the anti-fuse memory cell, then the memory cell can be programmed by breaking down the gate dielectric, but leakage paths in the programming transistor cause undesired stress on unselected cells and reduce reliability

Engineering Contradiction:
Improvememory device reliabilityVSAvoidleakage current
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent removes the programming transistor from the anti-fuse memory cell structure, extracting the source of leakage current. The anti-fuse structure is directly connected to word lines and bit lines without requiring a programming transistor, thereby eliminating leakage paths that cause undesired stress on unselected cells.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a dummy gate structure as an intermediary element. The dummy gate is positioned over the active region where the anti-fuse structure is formed, and it serves as a placeholder that prevents direct connection between word lines and the anti-fuse structure during programming, thereby blocking leakage current paths while allowing the programming voltage to be applied to the anti-fuse structure through controlled contacts.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Area of stationary object

If a programming transistor is included in each memory cell, then programming functionality is achieved, but the area required for each memory cell increases

Engineering Contradiction:
Improvememory cell areaVSAvoidprogramming functionality
Core Design Contradiction:
Area of stationary objectVSEase of operation

Solution Approach 1:

The programming transistor is completely removed from the memory cell structure. The anti-fuse memory cell consists only of the anti-fuse structure (first electrode, second electrode, and insulator) directly connected to the word line and bit line, eliminating the need for additional transistor components and reducing the overall cell area.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The same anti-fuse structure serves multiple functions: it acts as both the programming element (where the insulator breakdown occurs) and the storage element (where the programmed state is retained). This multi-functionality eliminates the need for separate programming and storage components, reducing area requirements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Device complexity

If existing CMOS technologies are used to form anti-fuse memory cells with programming transistors, then fabrication compatibility is maintained, but the complexity of the device structure increases

Engineering Contradiction:
Improvememory cell structureVSAvoidfabrication compatibility
Core Design Contradiction:
Device complexityVSEase of manufacture

Solution Approach 1:

The programming transistor is removed from the device structure, simplifying the overall architecture. The memory cell now consists only of the anti-fuse structure with its electrodes and insulator, reducing the number of components that need to be fabricated and assembled.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a dummy gate structure that is asymmetric in function - it appears where a real gate would be in a conventional transistor, but it serves only as a placeholder or spacer rather than an active switching element. This asymmetric design allows the structure to maintain compatibility with standard CMOS fabrication processes while simplifying the actual device operation.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances the reliability of anti-fuse memory devices by minimizing leakage currents, reducing the area required for memory cell arrays, and maintaining compatibility with existing fabrication processes, resulting in a more efficient and reliable memory storage solution.

Implementation Method 1

breaking down an insulator laterally interposed between a first via structure and a second via structure by applying a second voltage on the second via structure

Methodology Applied
Scientific EffectDielectric breakdown:

Data Source

PatentUS20230389303A1Memory devices and methods for operating the same
Publication Date: 2023.11.30 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20230389303A1 patent drawing
  • US20230389303A1 patent drawing
  • US20230389303A1 patent drawing

AI summary

A memory device includes a first memory cell including a first transistor and a first anti-fuse structure electrically coupled to each other in series. The first transistor includes a first gate structure extending across an active region, a first source/drain structure disposed in a first portion of the active region, and a second source/drain structure disposed in a second portion of the active region. The first anti-fuse structure includes a first electrode electrically coupled to the first source/drain structure, a second electrode disposed over a first dummy gate structure, and a first insulator laterally interposed between the first electrode and the second electrode.