Antireflection Member for Semiconductor Substrate Notch Detection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In the process of manufacturing semiconductor devices, the orienter apparatus struggles with accurate detection of the outer peripheral position of a substrate notch due to irregular light reflection from the substrate's pattern or oxide film, leading to notch detection errors during ion implantation.
Innovation Solution
An antireflection member is integrated into the orienter apparatus, comprising plate parts with antireflection surfaces that shield irregular light reflections, preventing re-reflection and ensuring that the light-emitting element's light is appropriately received by the light-receiving element, thereby reducing notch detection errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the orienter apparatus uses light emission and reception to detect substrate notch position, then the notch position can be detected, but irregular light reflection from substrate pattern or oxide film causes detection errors
Solution Approach 1:
The patent introduces a light-receiving unit positioned to receive light that has reflected off the substrate and then reflected again by a dedicated reflection surface. This intermediary reflection surface acts as a mediator to guide the light signal to the detector, ensuring that even irregularly reflected light from the substrate pattern or oxide film can be properly directed to the light-receiving unit for accurate notch position detection.
Solution Approach 2:
The patent adds a spatial dimension to the light detection system by introducing a separate reflection surface that is angled relative to the substrate. This creates a multi-dimensional light path where light reflects from the substrate, then reflects again from the angled reflection surface onto the light-receiving unit, effectively separating the detection path from direct substrate reflection and enabling accurate detection despite surface irregularities.
2Measurement precision
If the orienter apparatus rotates the substrate during light irradiation, then the outer peripheral position of the notch can be detected, but re-reflection of light reduces detection accuracy
Solution Approach 1:
The patent converts the harmful effect of light re-reflection into a beneficial detection mechanism. By positioning a dedicated reflection surface at a specific angle, the system captures light that would otherwise be lost through re-reflection and redirects it onto the light-receiving unit. This transforms energy loss into useful signal enhancement, improving detection accuracy while utilizing the re-reflected light that would normally be wasted.
3Ease of manufacture
If the orienter apparatus configuration is simplified to reduce costs, then manufacturing cost decreases, but light reception accuracy may be compromised
Solution Approach 1:
The patent applies local quality by introducing a reflection surface only in the specific region where light reception occurs, rather than complicating the entire apparatus. This localized addition of a reflective element provides the necessary optical function to improve light reception accuracy while maintaining simplicity and cost-effectiveness in the rest of the apparatus configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The antireflection member effectively suppresses irregular light reflections, allowing for accurate detection of the substrate notch position, reducing noise components in the received light and preventing notch detection errors while maintaining a cost-effective apparatus configuration.
Implementation Method 1
irregular light reflection from the substrate's pattern or oxide film
Implementation Method 2
antireflection surfaces that shield irregular light reflections, preventing re-reflection
Data Source
AI summary
According to one embodiment, there is provided an antireflection member including a first plate part, a second plate part, and a third plate part. The first plate part has a first end and a second end. The second end is arranged at a side opposite to the first end. The second plate part extends from a vicinity of the first end. A first notch part is arranged on the second plate part. The second plate part has an antireflection surface. The third plate part extends from a vicinity of the second end to be opposed to the second plate part A second notch part is arranged at a position corresponding to the first notch part on the third plate part. The third plate part has an antireflection surface directed to the antireflection surface of the second plate part.