Antireflective Structure With Bottomed Cylindrical Light Absorbing Units

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Solution Overview

Problem

Existing antireflective structures, such as those with diffraction patterns or fine recesses and protrusions, do not provide sufficient antireflection performance, necessitating the development of a more effective solution.

Innovation Solution

An antireflective structure comprising light absorbing units with specific geometrical and dimensional characteristics, including a bottomed cylindrical shape with a circular outer edge, a rising wall portion, and an opening portion, where the average opening diameter is between 1 μm and 10 μm, and the maximum and minimum diameters have a defined ratio, along with minute projection structures at an average pitch of 10 nm to 500 nm, to enhance antireflection performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a diffraction pattern with height difference not less than 1.5 μm and pitch interval not more than 250 nm is formed, then the structure provides antireflection function, but the antireflection performance is not sufficient

Engineering Contradiction:
Improveantireflection performanceVSAvoidstructure precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The invention divides the antireflective structure into multiple functional layers: a base layer with diffraction pattern (pitch ≤250 nm, height ≥1.5 μm) and an upper layer with light absorbing units (cylindrical structures with opening diameter 1-10 μm). This segmentation allows each layer to contribute differently to light management - the base layer provides diffraction-based antireflection while the upper layer provides absorption, collectively achieving superior antireflection performance that neither layer could achieve alone.

Inventive Principle:
Principle #1Segmentation

2Reliability

If fine recesses and protrusions are formed on the surface, then reflection of light is prevented, but the antireflection performance is not necessarily sufficient

Engineering Contradiction:
Improveantireflection performanceVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention creates a composite structure combining two distinct functional elements: diffraction patterns (fine recesses and protrusions with specific pitch and height) and light absorbing units (cylindrical structures with controlled opening diameters). This composite approach integrates two different antireflection mechanisms - diffraction and absorption - into a single system, achieving enhanced antireflection performance that exceeds the capability of either mechanism alone while maintaining manufacturability through established processes.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed structure achieves excellent antireflection performance by optimizing the arrangement and dimensions of light absorbing units, reducing optical interference and defects, thereby improving the absorption of light.

Implementation Method 1

An antireflective structure including a plurality of light absorbing units each having a bottomed cylindrical shape... the antireflective structure achieves excellent antireflection performance by optimizing the arrangement and dimensions of light absorbing units, reducing optical interference and defects, thereby improving the absorption of light

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Data Source

PatentUS11243334B2Antireflective structure
Publication Date: 2022.02.08 OJI HLDG CORP
  • US11243334B2 patent drawing
  • US11243334B2 patent drawing
  • US11243334B2 patent drawing

AI summary

An anti-reflection structure having multiple bottomed tubular light absorption units that each have a bottom part having a substantially circular outer edge part and a wall part that is arranged upright along the outer edge part, an opening being formed above the bottom part, the anti-reflection structure satisfying specific conditions.