AOI Synchronization Controller for Multi-Mode Inspection
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Solution Overview
Problem
Conventional automatic optical inspection (AOI) systems require multiple scans with different illumination modes, leading to reduced inspection speed and efficiency due to the inability to switch between bright-field and dark-field illumination modes quickly enough, resulting in increased inspection time and lower yield.
Innovation Solution
An AOI device and method utilizing a synchronization controller to individually activate and deactivate detectors and light sources based on the object's position, allowing each detector to capture images in a specific illumination mode provided by a corresponding light source, enabling simultaneous inspection with multiple measurement configurations within a single scan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single detector is used for both bright-field and dark-field scans, then device complexity is reduced, but inspection speed and frame rate are limited due to the inability to switch between illumination modes quickly enough
Solution Approach 1:
The system divides the inspection function into multiple detectors, each dedicated to a specific illumination mode (bright-field or dark-field). This segmentation allows parallel operation of multiple detectors simultaneously capturing images under different illumination conditions, thereby increasing overall inspection speed while maintaining specialized optimization for each mode.
Solution Approach 2:
The system merges multiple detectors and light sources into a coordinated inspection system controlled by a synchronization controller. By combining multiple detection channels and illuminating them simultaneously with corresponding light sources, the system achieves high-speed multi-mode inspection that overcomes the frame rate limitations of single-detector sequential scanning.
2Measurement precision
If multiple scans with different illumination modes are performed sequentially, then detection sensitivity for various defect types is improved, but inspection time increases and inspection efficiency decreases
Solution Approach 1:
The synchronization controller coordinates periodic activation of different light sources and detectors in a synchronized manner. Multiple detectors capture images under different illumination modes in rapid succession or simultaneously, creating a periodic multi-mode inspection cycle that maintains high detection sensitivity while minimizing the time lost to mode switching.
Solution Approach 2:
The system maintains continuous inspection action by having multiple detectors operate simultaneously under different illumination modes. Instead of stopping or slowing down to switch between bright-field and dark-field modes sequentially, the continuous parallel operation of multiple detectors ensures that useful inspection action occurs without interruption, thereby reducing total inspection time while maintaining comprehensive defect detection capability.
3Device complexity
If the same detector is reused for both illumination modes, then device complexity is minimized, but frame rate and inspection efficiency are constrained by the detector's switching capability
Solution Approach 1:
The inspection system segments the detection function across multiple detectors, with each detector specialized for a particular illumination mode. This eliminates the need for detectors to switch between modes, allowing each detector to operate continuously at its maximum frame rate for its designated mode, thereby achieving high overall inspection speed.
Solution Approach 2:
The synchronization controller serves as a universal coordinating component that manages multiple detectors and light sources. By providing centralized control and coordination, the controller enables the system to achieve multi-functionality (simultaneous bright-field and dark-field inspection) without requiring each detector to be universally capable of operating in multiple illumination modes, thus maintaining high frame rates.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly improves inspection efficiency by allowing multiple measurement configurations to be accomplished in a single scanning process, reducing inspection time and increasing frame rate, thereby enhancing detection sensitivity and yield.
Implementation Method 1
a plurality of light sources for illuminating the object under inspection with different illumination modes
Implementation Method 2
a plurality of detectors for capturing images of the object under inspection
Data Source
AI summary
An automatic optical inspection (AOI) device and method are disclosed. The device is adapted to inspect an object under inspection (OUI) (102) carried on a workpiece stage (101) and includes: a plurality of detectors (111, 112) for capturing images of the OUI (102); a plurality of light sources (121, 122) for illuminating the OUI (102) in different illumination modes; and a synchronization controller (140) signal-coupled to both the plurality of detectors (111, 112) and the plurality of light sources (121, 122). The synchronization controller (140) is configured to directly or indirectly control the plurality of detectors (111, 112) and the plurality of light sources (121, 122) based on the position of the OUI (102) so that each of them is individually activated and deactivated according to a timing profile, that each of the detectors (111, 112) is able to capture images of the OUI (102) in an illumination mode provided by a corresponding one of the light sources (121, 122), and that when any one of the light sources (121, 122) is illuminating the OUI (102), only the one of the detectors (111, 112) corresponding to this light source (121, 122) is activated. Through the timing control over the multiple light sources (121, 122) and detectors (111, 112) by the synchronization controller (140), inspection with multiple measurement configurations can be accomplished within a single scan, resulting in a significant improvement in inspection efficiency.