Avalanche Photodetector Backside Heat Sinks and Reflecting Islands

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Solution Overview

Problem

Conventional avalanche photo detector (APD) devices face challenges in enhancing sensitivity and heat dissipation, particularly in high-sensitivity applications like long-haul fiber-optic telecommunications and near-infrared detection, where overheating can impact device performance.

Innovation Solution

The APD device incorporates a substrate with an APD structure on the front side and heat sinks and reflecting islands on the back side, where the reflecting islands increase light reflection and sensitivity, and the heat sinks improve thermal dissipation by creating additional paths for heat dissipation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional APD device structure is used, then device simplicity is maintained, but sensitivity and responsibility are insufficient

Engineering Contradiction:
ImprovesensitivityVSAvoiddevice structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The device is segmented into functionally distinct regions: the front side contains the APD structure for light detection, while the back side contains heat sinks for thermal management and reflecting islands for light reflection. This segmentation allows each region to optimize its specific function, improving sensitivity through the reflecting islands that redirect light back to the APD structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention utilizes the back side of the substrate as an additional functional dimension. Instead of only optimizing the front side for detection, the back side is engineered with heat sinks and reflecting islands that work together to improve thermal management and light sensitivity, effectively adding another dimension of performance optimization.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Temperature

If conventional APD device structure is used, then manufacturing simplicity is maintained, but heat dissipation is insufficient

Engineering Contradiction:
Improveheat dissipationVSAvoidmanufacturing process
Core Design Contradiction:
TemperatureVSEase of manufacture

Solution Approach 1:

Thermal management is segmented as a separate function from light detection. Heat sinks are specifically designed and positioned on the back side of the substrate, creating dedicated thermal pathways that conduct heat away from the APD structure without interfering with the light detection function on the front side.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The substrate back side acts as an intermediary between the heat-generating APD structure and the heat sinks. By patterning the back side to form heat sinks and recesses, the invention creates an intermediate thermal management layer that efficiently conducts heat away from the device while maintaining structural integrity.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If reflecting islands are added to improve sensitivity, then light reflection increases, but device complexity increases

Engineering Contradiction:
ImproveresponsibilityVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The reflecting islands are merged with the back side patterning process. By forming the reflecting islands within the recesses created during heat sink patterning, the invention combines multiple functions (light reflection and thermal management) into a single integrated structure, reducing overall device complexity while achieving improved sensitivity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The back side of the substrate is designed to serve multiple functions simultaneously: heat sinks for thermal management, reflecting islands for light reflection, and recesses that accommodate both features. This multi-functionality approach improves sensitivity through light reflection without requiring separate additional structures.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the sensitivity and responsibility of the APD device by up to 2 dBm while reducing overheating impacts, thereby improving overall performance.

Implementation Method 1

lights passing through the APD structure are reflected back to it by the reflecting islands

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 2

the heat sinks improve heat dissipation by increasing thermal paths

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS9905711B2Avalanche photo detector device and manufacturing method thereof
Publication Date: 2018.02.27 UNITED MICROELECTRONICS CORP
  • US9905711B2 patent drawing
  • US9905711B2 patent drawing
  • US9905711B2 patent drawing

AI summary

An avalanche photodetector device includes a substrate having a front side and a back side, an avalanche photo detector structure disposed on the front side of the substrate, a plurality of heat sinks disposed on the back side of the substrate, and a plurality of reflecting islands disposed on the back side of the substrate.